Inventor
TSAI CHENG-HSIUNG MATTHEW
US12 patents
⚠️ This page may combine multiple inventors who share the name “TSAI CHENG-HSIUNG MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUSD947914SApr 5, 2022
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC14 citations92
USD960216SAug 9, 2022
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC10 citations84
US8971009B2Mar 3, 2015
Electrostatic chuck with temperature control
APPLIED MATERIALS INC13 citations83
US10892180B2Jan 12, 2021
Lift pin assembly
APPLIED MATERIALS INC16 citations82
US12014906B2Jun 18, 2024
High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber
APPLIED MATERIALS INC2 citations72
US9608549B2Mar 28, 2017
Electrostatic chuck
APPLIED MATERIALS INC4 citations72
US11887878B2Jan 30, 2024
Detachable biasable electrostatic chuck for high temperature applications
APPLIED MATERIALS INC2 citations71
USD1071886SApr 22, 2025
Substrate support for a substrate processing chamber
APPLIED MATERIALS INC3 citations69
US9147558B2Sep 29, 2015
Finned shutter disk for a substrate process chamber
APPLIED MATERIALS INC2 citations59
US11939666B2Mar 26, 2024
Methods and apparatus for precleaning and treating wafer surfaces
APPLIED MATERIALS INC0 citations50
US10593521B2Mar 17, 2020
Substrate support for plasma etch operations
APPLIED MATERIALS INC0 citations44