Inventor · disambiguated record
Abhiram Govindaraju
Also filed as: GOVINDARAJU ABHIRAM · GOVINDARAJU ABHIRAM LAKSHMI GANESH
4 granted patents·11 citations·filing 2010–2020
66Inventor score
Top patents by PatentIndex Score
4 records- 0179US8368039B2EUV light source glint reduction systemCYMER INC·Filed 2010·Granted Feb 5, 2013·6 cites·25 claims
- 0276US9279445B2Droplet generator steering systemBAUMGART PETER M·Filed 2011·Granted Mar 8, 2016·5 cites·18 claims
- 0356US10426020B2Droplet generator steering systemASML NETHERLANDS BV·Filed 2016·Granted Sep 24, 2019·0 cites·20 claims
- 0435US11963285B2Target material control in an EUV light sourceASML NETHERLANDS BV·Filed 2020·Granted Apr 16, 2024·0 cites·40 claims
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