Inventor
KONDOH KEISUKE
JP35 patents
⚠️ This page may combine multiple inventors who share the name “KONDOH KEISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
28 patentsUS6699003B2Mar 2, 2004
Carrying device
TOKYO ELECTRON LTD522 citations99
US6450757B1Sep 17, 2002
Conveyor system
TOKYO ELECTRON LTD549 citations99
US6328864B1Dec 11, 2001
Vacuum processing apparatus
TOKYO ELECTRON LTD304 citations98
USD527751SSep 5, 2006
Transfer-chamber
TOKYO ELECTRON LTD22 citations92
US6950721B2Sep 27, 2005
Positioning substrate for semiconductor process
TOKYO ELECTRON LTD33 citations92
US10134619B2Nov 20, 2018
Connecting mechanism and connecting method of substrate container
TOKYO ELECTRON LTD20 citations84
US10128134B2Nov 13, 2018
Substrate transfer method and processing system
TOKYO ELECTRON LTD8 citations84
US8382088B2Feb 26, 2013
Substrate processing apparatus
TOKYO ELECTRON LTD15 citations84
US7198251B2Apr 3, 2007
Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same
TOKYO ELECTRON LTD15 citations84
US7286890B2Oct 23, 2007
Transfer apparatus for target object
TOKYO ELECTRON LTD13 citations83
USD556157SNov 27, 2007
Load-lock chamber
TOKYO ELECTRON LTD9 citations73
US10229847B2Mar 12, 2019
Substrate transfer chamber and container connecting mechanism with lid opening mechanisms
TOKYO ELECTRON LTD2 citations72
US9732881B2Aug 15, 2017
Gate valve and substrate processing system
TOKYO ELECTRON LTD2 citations72
US9455166B2Sep 27, 2016
Substrate transporting apparatus, substrate delivery position confirming method, and substrate processing system
TOKYO ELECTRON LTD2 citations63
US8382938B2Feb 26, 2013
Gate valve cleaning method and substrate processing system
TOKYO ELECTRON LTD2 citations63
US8048235B2Nov 1, 2011
Gate valve cleaning method and substrate processing system
TOKYO ELECTRON LTD4 citations63
US7942622B2May 17, 2011
Transfer/alignment method in vacuum processing apparatus, vacuum processing apparatus and computer storage medium
TOKYO ELECTRON LTD5 citations63
US7361920B2Apr 22, 2008
Substrate processing apparatus and transfer positioning method thereof
TOKYO ELECTRON LTD2 citations63
US7018162B2Mar 28, 2006
Articulated carrying device
TOKYO ELECTRON LTD6 citations63
US10906756B2Feb 2, 2021
Substrate processing device
TOKYO ELECTRON LTD1 citations62
US11257707B2Feb 22, 2022
Substrate gripping mechanism, substrate transfer device, and substrate processing system
TOKYO ELECTRON LTD1 citations61
US7129147B2Oct 31, 2006
Delivery position aligning method for use in a transfer system and a processing system employing the method
TOKYO ELECTRON LTD6 citations54
US11545381B2Jan 3, 2023
Substrate transporting method and substrate processing system
TOKYO ELECTRON LTD0 citations52
US10347510B2Jul 9, 2019
Substrate transfer chamber, substrate processing system, and method for replacing gas in substrate transfer chamber
TOKYO ELECTRON LTD0 citations52
US10896835B2Jan 19, 2021
Processing system
TOKYO ELECTRON LTD0 citations50
US10403529B2Sep 3, 2019
Carrier transport device and carrier transport method
TOKYO ELECTRON LTD0 citations42
US9448063B2Sep 20, 2016
Method and apparatus for detecting position of substrate transfer device, and storage medium
TOKYO ELECTRON LTD0 citations42
US11554493B2Jan 17, 2023
Transfer apparatus
TOKYO ELECTRON LTD0 citations41
KONDOH KEISUKE
4 patentsUS8395136B2Mar 12, 2013
Positional deviation detection apparatus and process system employing the same
KONDOH KEISUKE13 citations83
US8326468B2Dec 4, 2012
Substrate transfer apparatus, substrate transfer module, substrate transfer method and computer readable storage medium
KONDOH KEISUKE8 citations83
US8280545B2Oct 2, 2012
Vacuum processing apparatus and method, and storage medium for executing the method
KONDOH KEISUKE8 citations83
US8740535B2Jun 3, 2014
Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage medium
KONDOH KEISUKE2 citations62