Inventor · disambiguated record
Shuji Nomura
Also filed as: NOMURA SHUJI
11 granted patents·2 pending applications·179 citations·filing 1996–2011
91Inventor score
Top patents by PatentIndex Score
13 records- 0188US7850827B2Double-layer shutter control method of multi-sputtering systemCANON ANELVA CORP·Filed 2005·Granted Dec 14, 2010·8 cites·11 claims
- 0288US6641703B2Magnetic multi-layer film manufacturing apparatusANELVA CORP·Filed 2001·Granted Nov 4, 2003·38 cites·38 claims
- 0384US8900426B2Double-layer shutter sputtering apparatusNOMURA SHUJI·Filed 2011·Granted Dec 2, 2014·4 cites·6 claims
- 0474US6069094AMethod for depositing a thin filmHIDEKI MATSUMRA·Filed 1997·Granted May 30, 2000·41 cites·13 claims
- 0568US5923089AEfficient routing method and resulting structure for integrated circuitsOKI AMERICA INC·Filed 1997·Granted Jul 13, 1999·33 cites·17 claims
- 0666US2009139865A1Double-layer shutter control method of multi-sputtering systemCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 0760US6723664B2Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junctionMATSUMURA HIDEKI·Filed 2002·Granted Apr 20, 2004·6 cites·2 claims
- 0860US6349669B1Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junctionMATSUMURA HIDEKI·Filed 1998·Granted Feb 26, 2002·21 cites·13 claims
- 0956US7704556B2Silicon nitride film forming methodCANON ANELVA CORP·Filed 2007·Granted Apr 27, 2010·0 cites·11 claims
- 1056US6699592B2Galvannealed steel sheet and method for manufacturing the sameNIPPON KOKAN KK·Filed 2002·Granted Mar 2, 2004·6 cites·29 claims
- 1149US5767011AFabrication method for integrated circuitsOKI SEMICONDUCTOR AN OPERATING·Filed 1996·Granted Jun 16, 1998·17 cites·21 claims
- 1238US2003198743A1Silicon nitride film forming apparatus and film forming methodFiled 2003·Application pending·0 cites
- 1335US5849423AZinciferous plated steel sheet and method for manufacturing sameNIPPON KOKAN KK·Filed 1996·Granted Dec 15, 1998·5 cites·52 claims
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