Inventor · disambiguated record
Mika Jauhiainen
Also filed as: JAUHIAINEN MIKA
5 granted patents·4 pending applications·2 citations·filing 2009–2021
63Inventor score
Top patents by PatentIndex Score
9 records- 0175US10023957B2Apparatus and method for processing substrateBENEQ OY·Filed 2013·Granted Jul 17, 2018·1 cites·14 claims
- 0264US2018251896A1Apparatus for processing substrateBENEQ OY·Filed 2018·Application pending·0 cites
- 0362US8496753B2Arrangement in connection with ALD reactorJAUHIAINEN MIKA·Filed 2009·Granted Jul 30, 2013·1 cites·15 claims
- 0452US11214866B2Nozzle head and apparatusBENEQ OY·Filed 2020·Granted Jan 4, 2022·0 cites·7 claims
- 0550US11702745B2Nozzle and nozzle headBENEQ OY·Filed 2018·Granted Jul 18, 2023·0 cites·9 claims
- 0650US2021214847A1Nozzle headBENEQ OY·Filed 2018·Application pending·0 cites
- 0750US2015004318A1Nozzle and nozzle headBENEQ OY·Filed 2013·Application pending·0 cites
- 0847US12460292B2Atomic layer deposition apparatus and a methodBENEQ OY·Filed 2021·Granted Nov 4, 2025·0 cites·16 claims
- 0947US2023407474A1An atomic layer deposition apparatus and a methodBENEQ OY·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →