Inventor · disambiguated record
Alton H. Phillips
Also filed as: PHILLIPS ALTON · PHILLIPS ALTON H · PHILLIPS ALTON HUGH
44 granted patents·34 pending applications·1,027 citations·filing 1998–2024
98Inventor score
Top patents by PatentIndex Score
78 records- 0199US6600547B2Sliding sealNIKON CORP·Filed 2001·Granted Jul 29, 2003·713 cites·28 claims
- 0294US12151378B2Vibration reduction system for precision robotics applicationsNIKON CORP·Filed 2021·Granted Nov 26, 2024·2 cites·24 claims
- 0394US12055193B2Vibration isolation systems with reaction masses and actuatorsNIKON CORP·Filed 2021·Granted Aug 6, 2024·2 cites·21 claims
- 0494US7477358B2EUV reticle handling system and methodNIKON CORP·Filed 2005·Granted Jan 13, 2009·16 cites·20 claims
- 0588US8284379B2Devices and methods for reducing residual reticle chucking forcesPHILLIPS ALTON H·Filed 2008·Granted Oct 9, 2012·10 cites·37 claims
- 0688US6880942B2Adaptive optic with discrete actuators for continuous deformation of a deformable mirror systemNIKON CORP·Filed 2003·Granted Apr 19, 2005·28 cites·16 claims
- 0787US7591561B2Liquid cooled mirror for use in extreme ultraviolet lithographyNIKON CORP·Filed 2006·Granted Sep 22, 2009·22 cites·19 claims
- 0887US6774981B1Modular exposure apparatus with removable optical device and improved isolation of the optical deviceNIKON CORP·Filed 2000·Granted Aug 10, 2004·24 cites·112 claims
- 0985US12066677B2Balanced active stabilizersNIKON CORP·Filed 2021·Granted Aug 20, 2024·1 cites·47 claims
- 1085US7804583B2EUV reticle handling system and methodNIKON CORP·Filed 2008·Granted Sep 28, 2010·6 cites·9 claims
- 1185US6989922B2Deformable mirror actuation systemNIKON CORP·Filed 2003·Granted Jan 24, 2006·23 cites·26 claims
- 1284US6614508B2Reversed, double-helical bellows sealNIKON CORP·Filed 2001·Granted Sep 2, 2003·20 cites·13 claims
- 1383US6922293B2Kinematic optical mounting assembly with flexuresNIKON CORP·Filed 2002·Granted Jul 26, 2005·28 cites·77 claims
- 1482US6953109B2Vibration isolator with low lateral stiffnessNIKON CORP·Filed 2002·Granted Oct 11, 2005·22 cites·87 claims
- 1580US7095482B2Multiple system vibration isolatorNIKON CORP·Filed 2002·Granted Aug 22, 2006·20 cites·102 claims
- 1680US2024328478A1Vibration isolation systems with reaction masses and actuatorsNIKON CORP·Filed 2024·Application pending·0 cites
- 1780US2024369797A1Balanced active stabilizersNIKON CORP·Filed 2024·Application pending·0 cites
- 1877US8767174B2Temperature-controlled holding devices for planar articlesSOGARD MICHAEL R·Filed 2011·Granted Jul 1, 2014·4 cites·44 claims
- 1977US7375797B2Utilities transfer system in a lithography systemNIKON CORP·Filed 2006·Granted May 20, 2008·3 cites·17 claims
- 2075US10335169B2Angled orthopaedic driverSYMMETRY MEDICAL MFG INC·Filed 2015·Granted Jul 2, 2019·3 cites·15 claims
- 2175US6987559B2Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising sameNIKON CORP·Filed 2002·Granted Jan 17, 2006·14 cites·39 claims
- 2273US7728462B2Monolithic stage devices providing motion in six degrees of freedomNIKON CORP·Filed 2007·Granted Jun 1, 2010·6 cites·35 claims
- 2371US12275066B2Systems and methods for improved melting in three-dimensional printing processesNIKON CORP·Filed 2021·Granted Apr 15, 2025·0 cites·14 claims
- 2469US8794011B2Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs)PHILLIPS ALTON H·Filed 2011·Granted Aug 5, 2014·2 cites·29 claims
- 2569US7773198B2Filtered device container assembly with shield for a reticleNIKON CORP·Filed 2007·Granted Aug 10, 2010·2 cites·19 claims
- 2664US10121760B2Wafer bonding system and methodNIKON CORP·Filed 2014·Granted Nov 6, 2018·1 cites·34 claims
- 2763US8847721B2Thermally conductive coil and methods and systemsCOOPER ALEXANDER·Filed 2009·Granted Sep 30, 2014·4 cites·24 claims
- 2863US8425060B2Self-correcting optical elements for high-thermal-load optical systemsWATSON DOUGLAS C·Filed 2007·Granted Apr 23, 2013·4 cites·33 claims
- 2961US8739383B2Method and apparatus for aligning mirror blocks of a multi-element mirror assemblyPHILLIPS ALTON H·Filed 2010·Granted Jun 3, 2014·1 cites·11 claims
- 3061US6533531B1Device for handling wafers in microelectronic manufacturingASML US INC·Filed 1998·Granted Mar 18, 2003·29 cites·14 claims
- 3161US2024367257A1Methods for large-scale optical manufacturingNIKON CORP·Filed 2022·Application pending·0 cites
- 3256US9041904B2High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography systemPHILLIPS ALTON H·Filed 2011·Granted May 26, 2015·0 cites·20 claims
- 3354US2010186942A1Reticle error reduction by coolingPHILLIPS ALTON H·Filed 2009·Application pending·0 cites
- 3454US2022266345A1Power supply assembly for additive manufacturing systemNIKON CORP·Filed 2022·Application pending·0 cites
- 3554US2022305733A1Powder supply assembly with level sensor and multiple stages with refillingNIKON CORP·Filed 2022·Application pending·0 cites
- 3653US9947637B2System and method for clamping wafers together in alignment using pressureNIKON CORP·Filed 2014·Granted Apr 17, 2018·0 cites·38 claims
- 3753US2022288855A1Additive manufacturing system with localized controlled environmentNIKON CORP·Filed 2022·Application pending·0 cites
- 3852US9041900B2High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography systemPHILLIPS ALTON H·Filed 2008·Granted May 26, 2015·0 cites·28 claims
- 3949US9323157B2Mirror assembly for an exposure apparatusPHILLIPS ALTON H·Filed 2012·Granted Apr 26, 2016·0 cites·25 claims
- 4049US8002420B2Hydrostatic liquid-metal deformable optical elementsNIKON CORP·Filed 2008·Granted Aug 23, 2011·0 cites·67 claims
- 4148US8619234B2Utilities transfer system in a lithography systemPHILLIPS ALTON HUGH·Filed 2006·Granted Dec 31, 2013·0 cites·6 claims
- 4248US6666611B2Three degree of freedom jointNIKON CORP·Filed 2001·Granted Dec 23, 2003·1 cites·21 claims
- 4348US2009033907A1Devices and methods for decreasing residual chucking forcesNIKON CORP·Filed 2008·Application pending·0 cites
- 4447US9304385B2Exposure method and device manufacturing method including selective deformation of a maskPHILLIPS ALTON H·Filed 2009·Granted Apr 5, 2016·0 cites·20 claims
- 4547US2012120379A1System and method for controlling the distortion of a reticlePHILLIPS ALTON H·Filed 2011·Application pending·0 cites
- 4647US2024227024A9Powder supply assembly for additive manufacturingNIKON CORP·Filed 2020·Application pending·0 cites
- 4747US2022212263A1Non-coaxial rotating turntables for additive manufacturingNIKON CORP·Filed 2020·Application pending·0 cites
- 4846US10114193B2Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axesPHILLIPS ALTON H·Filed 2011·Granted Oct 30, 2018·0 cites·29 claims
- 4946US7551265B2Contact material and system for ultra-clean applicationsNIKON CORP·Filed 2004·Granted Jun 23, 2009·6 cites·38 claims
- 5046US2007285632A1EUVL reticle stage and reticle protection system and methodNIKON CORP·Filed 2006·Application pending·0 cites
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