Inventor · disambiguated record
Sven Gunnar Krister Magnusson
Also filed as: MAGNUSSON SVEN GUNNAR KRISTER
6 granted patents·26 citations·filing 2008–2012
79Inventor score
Files withHOFMANS GERARDUS CAROLUS JOHANNUS2STAALS FRANK2GERAETS HUBERTUS ANTONIUS1MAGNUSSON SVEN GUNNAR KRISTER1
Top patents by PatentIndex Score
6 records- 0184US8554510B2Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program productSTAALS FRANK·Filed 2010·Granted Oct 8, 2013·5 cites·14 claims
- 0282US8908148B2Calibration method and inspection apparatusGERAETS HUBERTUS ANTONIUS·Filed 2011·Granted Dec 9, 2014·9 cites·10 claims
- 0380US8208122B2Method of measuring a lithographic projection apparatusSTAALS FRANK·Filed 2009·Granted Jun 26, 2012·7 cites·26 claims
- 0477US8436998B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2012·Granted May 7, 2013·3 cites·9 claims
- 0564US8289516B2Method of measuring focus of a lithographic projection apparatusHOFMANS GERARDUS CAROLUS JOHANNUS·Filed 2008·Granted Oct 16, 2012·2 cites·12 claims
- 0641US8174678B2Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing methodMAGNUSSON SVEN GUNNAR KRISTER·Filed 2008·Granted May 8, 2012·0 cites·19 claims
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