Inventor · disambiguated record
David W. Benzing
Also filed as: BENZING DAVID · BENZING DAVID W
10 granted patents·2 pending applications·637 citations·filing 1984–2008
92Inventor score
Files withLAM RES CORP5BENZING TECHNOLOGIES INC2BENZING DAVID W1BENZING TECHNOLOGY INC1HUBACEK JEROME S1
Top patents by PatentIndex Score
12 records- 0195US6974523B2Hollow anode plasma reactor and methodLAM RES CORP·Filed 2001·Granted Dec 13, 2005·59 cites·37 claims
- 0294US6823815B2Wafer area pressure control for plasma confinementLAM RES CORP·Filed 2002·Granted Nov 30, 2004·76 cites·17 claims
- 0394US4786352AApparatus for in-situ chamber cleaningBENZING TECHNOLOGIES INC·Filed 1986·Granted Nov 22, 1988·229 cites·33 claims
- 0491US4657616AIn-situ CVD chamber cleanerBENZING TECHNOLOGIES INC·Filed 1985·Granted Apr 14, 1987·116 cites·19 claims
- 0590US8845855B2Electrode for plasma processes and method for manufacture and use thereofHUBACEK JEROME S·Filed 2007·Granted Sep 30, 2014·23 cites·8 claims
- 0690US6492774B1Wafer area pressure control for plasma confinementLAM RES CORP·Filed 2000·Granted Dec 10, 2002·45 cites·17 claims
- 0785US4572759ATroide plasma reactor with magnetic enhancementBENZING TECHNOLOGY INC·Filed 1984·Granted Feb 25, 1986·71 cites·27 claims
- 0865US7470627B2Wafer area pressure control for plasma confinementLAM RES CORP·Filed 2004·Granted Dec 30, 2008·7 cites·18 claims
- 0961US8465620B2Hollow anode plasma reactor and methodBENZING DAVID W·Filed 2008·Granted Jun 18, 2013·1 cites·21 claims
- 1055US6669253B2Wafer boat and boat holderFiled 2000·Granted Dec 30, 2003·10 cites·10 claims
- 1154US2006027328A1Hollow anode plasma reactor and methodLAM RES CORP·Filed 2005·Application pending·0 cites
- 1239US2002127853A1Electrode for plasma processes and method for manufacture and use thereofFiled 2000·Application pending·0 cites
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