Inventor
SUZUKI KOUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI KOUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS7250094B2Jul 31, 2007
Heat treatment apparatus
TOKYO ELECTRON LTD6 citations71
US11396704B2Jul 26, 2022
Substrate holder and film forming apparatus
TOKYO ELECTRON LTD3 citations68
US7592261B2Sep 22, 2009
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system
TOKYO ELECTRON LTD2 citations62
US7842229B2Nov 30, 2010
Substrate processing apparatus and substrate rotating device
TOKYO ELECTRON LTD1 citations51
US7769279B2Aug 3, 2010
Heat treatment apparatus
TOKYO ELECTRON LTD1 citations50
SUZUKI KOUKI
4 patentsUSD658693SMay 1, 2012
Liner for plasma processing apparatus
SUZUKI KOUKI23 citations91
USD658691SMay 1, 2012
Liner for plasma processing apparatus
SUZUKI KOUKI15 citations83
USD658692SMay 1, 2012
Liner for plasma processing apparatus
SUZUKI KOUKI13 citations82
USD678228SMar 19, 2013
Chamber block
SUZUKI KOUKI7 citations79