Inventor · disambiguated record
Scott Dunham
Also filed as: DUNHAM SCOTT · DUNHAM SCOTT WILLIAM
7 granted patents·2 pending applications·508 citations·filing 1979–2016
89Inventor score
Top patents by PatentIndex Score
9 records- 0197US6206972B1Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processesGENUS INC·Filed 1999·Granted Mar 27, 2001·301 cites·14 claims
- 0295US6616766B2Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processesGENUS INC·Filed 2002·Granted Sep 9, 2003·62 cites·26 claims
- 0393US6626998B1Plasma generator assembly for use in CVD and PECVD processesGENUS INC·Filed 2000·Granted Sep 30, 2003·49 cites·4 claims
- 0492US7018940B2Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processesGENUS INC·Filed 2003·Granted Mar 28, 2006·61 cites·10 claims
- 0590US6284673B2Method for providing uniform gas delivery to substrates in CVD and PECVD processesGENUS INC·Filed 2001·Granted Sep 4, 2001·32 cites·4 claims
- 0644US2001054391A1Method and apparatus for providing uniform gas delivery to substrates in CVD and PECVD processesFiled 2001·Application pending·0 cites
- 0743US9793104B2Preparing a semiconductor surface for epitaxial depositionAIXTRON SE·Filed 2016·Granted Oct 17, 2017·0 cites·20 claims
- 0840USD261124STest tube baby figurineDUNHAM SCOTT·Filed 1979·Granted Oct 6, 1981·3 cites·1 claims
- 0933US2017125269A1Transfer module for a multi-module apparatusAIXTRON SE·Filed 2015·Application pending·0 cites
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