Inventor · disambiguated record
Paul B. Reuter
Also filed as: REUTER PAUL · REUTER PAUL B · REUTER PAUL BENJAMIN
54 granted patents·17 pending applications·543 citations·filing 2012–2025
97Inventor score
Files withAPPLIED MATERIALS INC64APPLIED MATERIALS ISRAEL LTD2LEE JARED AHMAD2MARCO SYSTEMANALYSE ENTW1PAL ANIRUDDHA1
Top patents by PatentIndex Score
71 records- 0198US11581203B2Systems for integrating load locks into a factory interface footprint spaceAPPLIED MATERIALS INC·Filed 2021·Granted Feb 14, 2023·7 cites·14 claims
- 0295US10446428B2Load port operation in electronic device manufacturing apparatus, systems, and methodsAPPLIED MATERIALS INC·Filed 2017·Granted Oct 15, 2019·11 cites·18 claims
- 0395US9355876B2Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locationsAPPLIED MATERIALS INC·Filed 2014·Granted May 31, 2016·452 cites·17 claims
- 0494US11244844B2High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methodsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 8, 2022·11 cites·25 claims
- 0594US10204805B2Thin heated substrate supportAPPLIED MATERIALS INC·Filed 2016·Granted Feb 12, 2019·10 cites·19 claims
- 0693US10262884B2Systems, apparatus, and methods for an improved load portAPPLIED MATERIALS INC·Filed 2016·Granted Apr 16, 2019·8 cites·14 claims
- 0792US12074045B2Prevention of contamination of substrates during gas purgingAPPLIED MATERIALS INC·Filed 2023·Granted Aug 27, 2024·1 cites·20 claims
- 0892US11791185B2Side storage pods, electronic device processing systems, and methods for operating the sameAPPLIED MATERIALS INC·Filed 2022·Granted Oct 17, 2023·1 cites·20 claims
- 0992US11353381B1Portable disc to measure chemical gas contaminants within semiconductor equipment and clean roomAPPLIED MATERIALS INC·Filed 2020·Granted Jun 7, 2022·3 cites·20 claims
- 1092US11189511B2Side storage pods, equipment front end modules, and methods for operating EFEMsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 30, 2021·7 cites·21 claims
- 1190US11993978B2Seal mechanism for load port doorsAPPLIED MATERIALS INC·Filed 2022·Granted May 28, 2024·1 cites·20 claims
- 1289US10090181B2Method and apparatus for substrate transfer and radical confinementLEE JARED AHMAD·Filed 2012·Granted Oct 2, 2018·9 cites·15 claims
- 1384US10566205B2Abatement and strip process chamber in a load lock configurationAPPLIED MATERIALS INC·Filed 2013·Granted Feb 18, 2020·4 cites·20 claims
- 1481US12094715B2Abatement and strip process chamber in a load lock configurationAPPLIED MATERIALS INC·Filed 2023·Granted Sep 17, 2024·0 cites·17 claims
- 1581US11508593B2Side storage pods, electronic device processing systems, and methods for operating the sameAPPLIED MATERIALS INC·Filed 2019·Granted Nov 22, 2022·2 cites·20 claims
- 1678US10453726B2Electronic device manufacturing load port apparatus, systems, and methodsAPPLIED MATERIALS INC·Filed 2016·Granted Oct 22, 2019·2 cites·20 claims
- 1778US2025038024A1Prevention of contamination of substrates during gas purgingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1877US12297691B2Seal mechanism for load port doorsAPPLIED MATERIALS INC·Filed 2023·Granted May 13, 2025·0 cites·20 claims
- 1977US11373891B2Front-ducted equipment front end modules, side storage pods, and methods of operating the sameAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·2 cites·23 claims
- 2077US10832928B2Systems, apparatus, and methods for an improved load portAPPLIED MATERIALS INC·Filed 2019·Granted Nov 10, 2020·1 cites·20 claims
- 2177US10278501B2Load lock door assembly, load lock apparatus, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2015·Granted May 7, 2019·2 cites·12 claims
- 2276US11081379B2Load port operation in electronic device manufacturing apparatus, systems, and methodsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 3, 2021·1 cites·20 claims
- 2375US10758045B2Load lock door assemblies, load lock apparatus, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 1, 2020·1 cites·20 claims
- 2475US2025354433A1Seal mechanism for load port doorsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2572US11637029B2Load port operation in electronic device manufacturing apparatus, systems, and methodsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 25, 2023·0 cites·20 claims
- 2672US11574831B2Method and apparatus for substrate transfer and radical confinementAPPLIED MATERIALS INC·Filed 2020·Granted Feb 7, 2023·0 cites·18 claims
- 2772US11171008B2Abatement and strip process chamber in a dual load lock configurationAPPLIED MATERIALS INC·Filed 2019·Granted Nov 9, 2021·1 cites·20 claims
- 2871US12159796B2Systems and methods for integrating load locks into a factory interface footprint spaceAPPLIED MATERIALS INC·Filed 2023·Granted Dec 3, 2024·0 cites·22 claims
- 2971US11404297B2Systems, apparatus, and methods for an improved load portAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·0 cites·20 claims
- 3071US2024375300A1Increased number of load ports on factory interface with robot that moves on trackAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3170US11640915B2Side storage pods, equipment front end modules, and methods for operating EFEMsAPPLIED MATERIALS INC·Filed 2021·Granted May 2, 2023·0 cites·20 claims
- 3270US10541165B2Systems, apparatus, and methods for an improved load port backplaneAPPLIED MATERIALS INC·Filed 2016·Granted Jan 21, 2020·1 cites·14 claims
- 3369US10276354B2Segmented focus ring assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Apr 30, 2019·1 cites·7 claims
- 3468US12076854B2Increased number of load ports on factory interface with robot that moves on trackAPPLIED MATERIALS INC·Filed 2022·Granted Sep 3, 2024·0 cites·20 claims
- 3568US11810805B2Prevention of contamination of substrates during gas purgingAPPLIED MATERIALS INC·Filed 2020·Granted Nov 7, 2023·0 cites·18 claims
- 3666US10943788B2Abatement and strip process chamber in a load lock configurationAPPLIED MATERIALS INC·Filed 2019·Granted Mar 9, 2021·0 cites·19 claims
- 3765US11276594B2Systems, apparatus, and methods for an improved load port backplaneAPPLIED MATERIALS INC·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
- 3865US2020144067A1Abatement and strip process chamber in a load lock configurationAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3964US2020066563A1Method and apparatus for substrate transfer and radical confinementAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4063US10056274B2System and method for forming a sealed chamberAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Aug 21, 2018·1 cites·13 claims
- 4162US11171029B2Electronic device manufacturing load port apparatus, systems, and methodsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 9, 2021·0 cites·20 claims
- 4262US10468282B2Method and apparatus for substrate transfer and radical confinementAPPLIED MATERIALS INC·Filed 2018·Granted Nov 5, 2019·0 cites·14 claims
- 4362US9464732B2Apparatus for uniform pumping within a substrate process chamberAPPLIED MATERIALS INC·Filed 2013·Granted Oct 11, 2016·1 cites·20 claims
- 4462US9435025B2Gas apparatus, systems, and methods for chamber portsAPPLIED MATERIALS INC·Filed 2013·Granted Sep 6, 2016·1 cites·7 claims
- 4562US2022293444A1Front-ducted equipment front end modules, side storage pods, and methods of operating the sameAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4659US12370573B2Equipment front end modules with induced gas mixing, and methods of use thereofAPPLIED MATERIALS INC·Filed 2022·Granted Jul 29, 2025·0 cites·17 claims
- 4759US12140339B2Filter isolation for equipment front end moduleAPPLIED MATERIALS INC·Filed 2022·Granted Nov 12, 2024·0 cites·20 claims
- 4858US11177136B2Abatement and strip process chamber in a dual loadlock configurationAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·0 cites·17 claims
- 4958US9587749B2Slit valve with a pressurized gas bearingAPPLIED MATERIALS ISRAEL LTD·Filed 2014·Granted Mar 7, 2017·1 cites·16 claims
- 5057US12142508B2Factory interface robots usable with integrated load locksAPPLIED MATERIALS INC·Filed 2021·Granted Nov 12, 2024·0 cites·17 claims
Showing the top 50 of 71 patent records by PatentIndex Score.
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