Inventor

FRANKLIN TIMOTHY JOSEPH

US26 patents

⚠️ This page may combine multiple inventors who share the name “FRANKLIN TIMOTHY JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FRANKLIN TIMOTHY JOSEPH

APPLIED MATERIALS INC

Method and apparatus for baking out a gate valve in a semiconductor processing system

Ring for an anti-rotation process kit for a substrate processing chamber

Thermal repeatability and in-situ showerhead temperature monitoring

Baffle for anti-rotation process kit for substrate processing chamber

Thermal repeatability and in-situ showerhead temperature monitoring

Method and apparatus for baking out a gate valve in a semiconductor processing system

Lift pin assembly

Tuneable uniformity control utilizing rotational magnetic housing

Porous plug for electrostatic chuck gas delivery

Selective etch rate monitor

Magnetic housing systems

Methods to fabricate chamber component holes using laser drilling

Magnetic housing systems

RF electrostatic chuck filter circuit

Replaceable electrostatic chuck outer ring for edge arcing mitigation

Substrate processing chamber

Shunt door for magnets in plasma process chamber

Thread profiles for semiconductor process chamber components

Methods to fabricate chamber component holes using laser drilling

Selective etch rate monitor

Methods and apparatus for conductance liners in semiconductor process chambers

Lift pin mechanism

Plasma resistant arc preventative coatings for manufacturing equipment components

Showerhead assembly with recursive gas channels

KRAUS PHILIP ALLAN

Selective etch rate monitor

CHUA THAI CHENG

Method and apparatus for atomic hydrogen surface treatment during GaN epitaxy