USD1066275SActiveUtility

Baffle for anti-rotation process kit for substrate processing chamber

85
Assignee: APPLIED MATERIALS INCPriority: Apr 4, 2022Filed: Apr 4, 2022Granted: Mar 11, 2025
Est. expiryApr 4, 2042(~15.7 yrs left)· nominal 20-yr term from priority
Inventors:Rohan RaneXue Yang ChangTimothy Joseph FranklinDaniel Sang Byun
85
PatentIndex Score
10
Cited by
66
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a baffle for anti-rotation process kit for substrate processing chamber, as shown and described.

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