Inventor · disambiguated record
Timothy Joseph Franklin
Also filed as: FRANKLIN TIMOTHY · FRANKLIN TIMOTHY J · FRANKLIN TIMOTHY JOSEPH
38 granted patents·20 pending applications·238 citations·filing 1996–2025
97Inventor score
Top patents by PatentIndex Score
58 records- 0196US10854483B2High pressure steam anneal processing apparatusAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·15 cites·20 claims
- 0295US12020977B2Lift pin assemblyAPPLIED MATERIALS INC·Filed 2022·Granted Jun 25, 2024·4 cites·20 claims
- 0394USD1049067SRing for an anti-rotation process kit for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted Oct 29, 2024·24 cites·1 claims
- 0492US10607817B2Thermal repeatability and in-situ showerhead temperature monitoringAPPLIED MATERIALS INC·Filed 2017·Granted Mar 31, 2020·7 cites·20 claims
- 0591US11557466B2Tuneable uniformity control utilizing rotational magnetic housingAPPLIED MATERIALS INC·Filed 2020·Granted Jan 17, 2023·2 cites·15 claims
- 0689US11508558B2Thermal repeatability and in-situ showerhead temperature monitoringAPPLIED MATERIALS INC·Filed 2020·Granted Nov 22, 2022·2 cites·18 claims
- 0789US6503131B1Integrated platen assembly for a chemical mechanical planarization systemAPPLIED MATERIALS INC·Filed 2001·Granted Jan 7, 2003·31 cites·40 claims
- 0888US7845308B1Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systemsLAM RES CORP·Filed 2006·Granted Dec 7, 2010·11 cites·16 claims
- 0986US12341048B2Porous plug for electrostatic chuck gas deliveryAPPLIED MATERIALS INC·Filed 2021·Granted Jun 24, 2025·1 cites·20 claims
- 1085USD1066275SBaffle for anti-rotation process kit for substrate processing chamberAPPLIED MATERIALS INC·Filed 2022·Granted Mar 11, 2025·10 cites·1 claims
- 1185US11959174B2Shunt door for magnets in plasma process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Apr 16, 2024·1 cites·20 claims
- 1284US9978621B1Selective etch rate monitorKRAUS PHILIP ALLAN·Filed 2016·Granted May 22, 2018·4 cites·20 claims
- 1384US6571657B1Multiple blade robot adjustment apparatus and associated methodAPPLIED MATERIALS INC·Filed 2000·Granted Jun 3, 2003·29 cites·38 claims
- 1483US8193803B2Current measuring deviceBOSE SANJAY·Filed 2009·Granted Jun 5, 2012·14 cites·12 claims
- 1581US8322045B2Single wafer apparatus for drying semiconductor substrates using an inert gas air-knifeSTEIN NATHAN D·Filed 2008·Granted Dec 4, 2012·10 cites·20 claims
- 1677US6568896B2Transfer chamber with side wall portAPPLIED MATERIALS INC·Filed 2001·Granted May 27, 2003·20 cites·21 claims
- 1776US2023139431A1Tuneable uniformity control utilizing rotational magnetic housingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1876US2024271284A1Shunt door for magnets in plasma process chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1975US7114693B1Stable cell platformAPPLIED MATERIALS INC·Filed 2000·Granted Oct 3, 2006·17 cites·2 claims
- 2074US11587764B2Magnetic housing systemsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 21, 2023·1 cites·12 claims
- 2174US2025179629A1Conditioning of a processing chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2272US12221694B2Conditioning of a processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Feb 11, 2025·0 cites·14 claims
- 2369US11819948B2Methods to fabricate chamber component holes using laser drillingAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·0 cites·15 claims
- 2469US11257698B2Selective etch rate monitorAPPLIED MATERIALS INC·Filed 2020·Granted Feb 22, 2022·0 cites·18 claims
- 2565US6361674B1Powered lift for ECP chamberAPPLIED MATERIALS INC·Filed 2000·Granted Mar 26, 2002·4 cites·32 claims
- 2662US6274854B1Method and apparatus for baking out a gate valve in a semiconductor processing systemAPPLIED MATERIALS INC·Filed 1999·Granted Aug 14, 2001·18 cites·40 claims
- 2761US12198903B2Plasma resistant arc preventative coatings for manufacturing equipment componentsAPPLIED MATERIALS INC·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 2861US10790175B2Selective etch rate monitorAPPLIED MATERIALS INC·Filed 2018·Granted Sep 29, 2020·0 cites·13 claims
- 2961US2023323531A1Coating interior surfaces of complex bodies by atomic layer depositionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3058US8975166B2Method and apparatus for atomic hydrogen surface treatment during GaN epitaxyCHUA THAI CHENG·Filed 2011·Granted Mar 10, 2015·1 cites·12 claims
- 3158US8318609B2Method of depositing materials on a non-planar surfaceMAROHL DAN·Filed 2009·Granted Nov 27, 2012·1 cites·11 claims
- 3256US9318306B2Interchangeable sputter gun headINTERMOLECULAR INC·Filed 2013·Granted Apr 19, 2016·0 cites·12 claims
- 3356US2023413446A1Diagnostic disc with a high vacuum and temperature tolerant power sourceAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3455US12211734B2Lift pin mechanismAPPLIED MATERIALS INC·Filed 2022·Granted Jan 28, 2025·0 cites·20 claims
- 3555US2024266152A1Plasma uniformity control system and methodsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3654US2025112075A1Metal bonded esc with outer ceramic vacuum isolation ring for cryogenic serviceAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3753US11560626B2Substrate processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jan 24, 2023·0 cites·14 claims
- 3853US11270905B2Modulating film properties by optimizing plasma coupling materialsAPPLIED MATERIALS INC·Filed 2020·Granted Mar 8, 2022·0 cites·20 claims
- 3953US11189517B2RF electrostatic chuck filter circuitAPPLIED MATERIALS INC·Filed 2020·Granted Nov 30, 2021·0 cites·21 claims
- 4053US6837964B2Integrated platen assembly for a chemical mechanical planarization systemAPPLIED MATERIALS INC·Filed 2002·Granted Jan 4, 2005·4 cites·22 claims
- 4153US2021310122A1Method of forming holes from both sides of substrateAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4253US2025323022A1Treatment chamber with modular microwave power deliveryAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4353US2009011573A1Carrier used for deposition of materials on a non-planar surfaceSOLYNDRA INC·Filed 2007·Application pending·0 cites
- 4451US12068137B2Thread profiles for semiconductor process chamber componentsAPPLIED MATERIALS INC·Filed 2020·Granted Aug 20, 2024·0 cites·17 claims
- 4550US12451331B2Showerhead assembly with recursive gas channelsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
- 4650US2022093362A1Showerhead assembly with recursive gas channelsAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4750US2013171350A1High Throughput Processing Using Metal Organic Chemical Vapor DepositionKRAUS PHILIP A·Filed 2011·Application pending·0 cites
- 4849US2021238744A1Shower head assemblyAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 4948US12354847B2Methods and apparatus for conductance liners in semiconductor process chambersAPPLIED MATERIALS INC·Filed 2020·Granted Jul 8, 2025·0 cites·20 claims
- 5048US12030135B2Methods to fabricate chamber component holes using laser drillingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 9, 2024·0 cites·15 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →