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Ring for an anti-rotation process kit for a substrate processing chamber

94
Assignee: APPLIED MATERIALS INCPriority: Apr 4, 2022Filed: Apr 4, 2022Granted: Oct 29, 2024
Est. expiryApr 4, 2042(~15.7 yrs left)· nominal 20-yr term from priority
Inventors:Rohan RaneXue Yang ChangTimothy Joseph FranklinDaniel Sang Byun
94
PatentIndex Score
24
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47
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a ring for an anti-rotation process kit for a substrate processing chamber, as shown and described.

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