Inventor
PAL ANIRUDDHA
US15 patents
⚠️ This page may combine multiple inventors who share the name “PAL ANIRUDDHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS10204805B2Feb 12, 2019
Thin heated substrate support
APPLIED MATERIALS INC10 citations83
US11359722B2Jun 14, 2022
Multinode multi-use O-ring and method for forming a seal
APPLIED MATERIALS INC11 citations82
US9947559B2Apr 17, 2018
Thermal management of edge ring in semiconductor processing
APPLIED MATERIALS INC3 citations73
US11574831B2Feb 7, 2023
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations62
US11177136B2Nov 16, 2021
Abatement and strip process chamber in a dual loadlock configuration
APPLIED MATERIALS INC0 citations62
US11171008B2Nov 9, 2021
Abatement and strip process chamber in a dual load lock configuration
APPLIED MATERIALS INC1 citations62
US10991552B2Apr 27, 2021
Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation
APPLIED MATERIALS INC0 citations60
US11090893B2Aug 17, 2021
Method of reclaiming a seal
APPLIED MATERIALS INC0 citations59
US12431338B2Sep 30, 2025
Composite structures for semiconductor process chambers
APPLIED MATERIALS INC0 citations56
USD1027120SMay 14, 2024
Seal for an assembly in a vapor deposition chamber
APPLIED MATERIALS INC0 citations56
US10468282B2Nov 5, 2019
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations51
US10249475B2Apr 2, 2019
Cooling mechanism utlized in a plasma reactor with enhanced temperature regulation
APPLIED MATERIALS INC0 citations50
LEE JARED AHMAD
3 patentsUS10090181B2Oct 2, 2018
Method and apparatus for substrate transfer and radical confinement
LEE JARED AHMAD9 citations82
US10453694B2Oct 22, 2019
Abatement and strip process chamber in a dual loadlock configuration
LEE JARED AHMAD0 citations50
US8562742B2Oct 22, 2013
Apparatus for radial delivery of gas to a chamber and methods of use thereof
LEE JARED AHMAD0 citations50