Inventor
BOH KELVIN
SG10 patents
Patents
10 patentsUSD913979SMar 23, 2021
Inner shield for a substrate processing chamber
APPLIED MATERIALS INC27 citations93
USD931241SSep 21, 2021
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC5 citations83
US11328929B2May 10, 2022
Methods, apparatuses and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC2 citations71
US12148629B2Nov 19, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
US11913107B2Feb 27, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations62
US11862480B2Jan 2, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
USD971167SNov 29, 2022
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC0 citations62
US11670513B2Jun 6, 2023
Apparatus and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC0 citations60
US11171017B2Nov 9, 2021
Shutter disk
APPLIED MATERIALS INC0 citations59
US12100577B2Sep 24, 2024
High conductance inner shield for process chamber
APPLIED MATERIALS INC0 citations51