USD971167SActiveUtility

Lower shield for a substrate processing chamber

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Assignee: APPLIED MATERIALS INCPriority: Aug 28, 2019Filed: Apr 10, 2021Granted: Nov 29, 2022
Est. expiryAug 28, 2039(~13.1 yrs left)· nominal 20-yr term from priority
Inventors:Sarath BabuAnanthkrishna JupudiYueh Sheng OwJunqi WeiKelvin BohYuichi WadaKang Zhang
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PatentIndex Score
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Cited by
46
References
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a lower shield for a substrate processing chamber, as shown and described.

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