Inventor · disambiguated record
Yueh Sheng Ow
Also filed as: OW YUEH SHENG
30 granted patents·5 pending applications·574 citations·filing 2013–2024
95Inventor score
Top patents by PatentIndex Score
35 records- 0198US9171714B2Integrated processing of porous dielectric, polymer-coated substrates and epoxy within a multi-chamber vacuum system confirmationAPPLIED MATERIALS INC·Filed 2013·Granted Oct 27, 2015·521 cites·10 claims
- 0289US12074400B1Substrate dimension adapterUNITY SEMICONDUCTOR·Filed 2024·Granted Aug 27, 2024·3 cites·18 claims
- 0387USD913979SInner shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Mar 23, 2021·27 cites·1 claims
- 0486US10629430B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2018·Granted Apr 21, 2020·4 cites·22 claims
- 0583US12148629B2Shutter diskAPPLIED MATERIALS INC·Filed 2023·Granted Nov 19, 2024·0 cites·10 claims
- 0681US10991617B2Methods and apparatus for cleaving of semiconductor substratesAPPLIED MATERIALS INC·Filed 2019·Granted Apr 27, 2021·2 cites·4 claims
- 0780US11328929B2Methods, apparatuses and systems for substrate processing for lowering contact resistanceAPPLIED MATERIALS INC·Filed 2019·Granted May 10, 2022·2 cites·13 claims
- 0878US9960035B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2017·Granted May 1, 2018·2 cites·20 claims
- 0977US9548200B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 17, 2017·3 cites·18 claims
- 1074US11862480B2Shutter diskAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·9 claims
- 1171USD973609SUpper shield with showerhead for a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Dec 27, 2022·5 cites·1 claims
- 1270US11610807B2Methods and apparatus for cleaving of semiconductor substratesAPPLIED MATERIALS INC·Filed 2021·Granted Mar 21, 2023·0 cites·19 claims
- 1370US11569122B2Methods and apparatus for cleaving of semiconductor substratesAPPLIED MATERIALS INC·Filed 2021·Granted Jan 31, 2023·0 cites·20 claims
- 1468US11171017B2Shutter diskAPPLIED MATERIALS INC·Filed 2020·Granted Nov 9, 2021·0 cites·12 claims
- 1564US11670513B2Apparatus and systems for substrate processing for lowering contact resistanceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·0 cites·18 claims
- 1658US9960023B2Methods and apparatus for nodule control in a titanium-tungsten targetAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·0 cites·16 claims
- 1757USD931241SLower shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Sep 21, 2021·5 cites·1 claims
- 1854US12080522B2Preclean chamber upper shield with showerheadAPPLIED MATERIALS INC·Filed 2020·Granted Sep 3, 2024·0 cites·19 claims
- 1953US11289357B2Methods and apparatus for high voltage electrostatic chuck protectionAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·0 cites·20 claims
- 2051US11913107B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2019·Granted Feb 27, 2024·0 cites·20 claims
- 2151US11881385B2Methods and apparatus for reducing defects in preclean chambersAPPLIED MATERIALS INC·Filed 2020·Granted Jan 23, 2024·0 cites·20 claims
- 2251US10950475B1Method and apparatus for processing a substrate using non-contact temperature measurementAPPLIED MATERIALS INC·Filed 2019·Granted Mar 16, 2021·0 cites·17 claims
- 2350US11629409B2Inline microwave batch degas chamberAPPLIED MATERIALS INC·Filed 2019·Granted Apr 18, 2023·0 cites·20 claims
- 2450US11375584B2Methods and apparatus for processing a substrate using microwave energyAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·0 cites·20 claims
- 2549US11114288B2Physical vapor deposition apparatusAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·0 cites·20 claims
- 2648US10677830B2Methods and apparatus for detecting microwave fields in a cavityAPPLIED MATERIALS INC·Filed 2017·Granted Jun 9, 2020·0 cites·20 claims
- 2746US12100577B2High conductance inner shield for process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Sep 24, 2024·0 cites·20 claims
- 2845US2021066051A1High conductance lower shield for process chamberAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2942USD971167SLower shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2021·Granted Nov 29, 2022·0 cites·1 claims
- 3042US10115573B2Apparatus for high compressive stress film deposition to improve kit lifeAPPLIED MATERIALS INC·Filed 2015·Granted Oct 30, 2018·0 cites·20 claims
- 3142US2021001520A1Methods and apparatus for microwave processing of polymer materialsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3241US12048948B2Methods for forming microwave tunable composited thin-film dielectric layerAPPLIED MATERIALS INC·Filed 2019·Granted Jul 30, 2024·0 cites·11 claims
- 3339US2018226282A1Non-contact substrate temperature measurement technique based on spectral inteferometryAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 3437US2017365490A1Methods for polymer coefficient of thermal expansion (cte) tuning by microwave curingAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3535US2018323091A1Method and apparatus for uniform thermal distribution in a microwave cavity during semiconductor processingAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →