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Upper shield with showerhead for a process chamber

71
Assignee: APPLIED MATERIALS INCPriority: Apr 22, 2020Filed: Apr 22, 2020Granted: Dec 27, 2022
Est. expiryApr 22, 2040(~13.8 yrs left)· nominal 20-yr term from priority
Inventors:Sarath BabuAnanthkrishna JupudiYueh Sheng OwJunqi WeiKelvin BohKang ZhangYuichi Wada
71
PatentIndex Score
5
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31
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an upper shield with showerhead for a process chamber, as shown and described.

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