Inventor · disambiguated record
Sarath Babu
Also filed as: BABU SARATH
16 granted patents·4 pending applications·53 citations·filing 2018–2024
89Inventor score
Files withAPPLIED MATERIALS INC20
Top patents by PatentIndex Score
20 records- 0193US10851453B2Methods and apparatus for shutter disk assembly detectionAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·11 cites·20 claims
- 0287USD913979SInner shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Mar 23, 2021·27 cites·1 claims
- 0385US11251028B2Pre-clean chamber with integrated shutter garageAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·4 cites·17 claims
- 0483US12148629B2Shutter diskAPPLIED MATERIALS INC·Filed 2023·Granted Nov 19, 2024·0 cites·10 claims
- 0574US11862480B2Shutter diskAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·9 claims
- 0672US11043406B2Two piece shutter disk assembly with self-centering featureAPPLIED MATERIALS INC·Filed 2019·Granted Jun 22, 2021·1 cites·18 claims
- 0771USD973609SUpper shield with showerhead for a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Dec 27, 2022·5 cites·1 claims
- 0868US11171017B2Shutter diskAPPLIED MATERIALS INC·Filed 2020·Granted Nov 9, 2021·0 cites·12 claims
- 0962US2025385079A1Heated Process Kit for Substrate ProcessingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1060US12476086B2Spray-coated electrostatic chuck designAPPLIED MATERIALS INC·Filed 2023·Granted Nov 18, 2025·0 cites·15 claims
- 1157USD931241SLower shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Sep 21, 2021·5 cites·1 claims
- 1256US2025015733A1Finger Electrostatic Chuck for High Resistance Substrate ChuckingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1354US12080522B2Preclean chamber upper shield with showerheadAPPLIED MATERIALS INC·Filed 2020·Granted Sep 3, 2024·0 cites·19 claims
- 1454US2024266200A1Electrostatic ChuckAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1553US11476097B2Common electrostatic chuck for differing substratesAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·0 cites·18 claims
- 1653US11289357B2Methods and apparatus for high voltage electrostatic chuck protectionAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·0 cites·20 claims
- 1751US11881385B2Methods and apparatus for reducing defects in preclean chambersAPPLIED MATERIALS INC·Filed 2020·Granted Jan 23, 2024·0 cites·20 claims
- 1846US12100577B2High conductance inner shield for process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Sep 24, 2024·0 cites·20 claims
- 1945US2021066051A1High conductance lower shield for process chamberAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2042USD971167SLower shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2021·Granted Nov 29, 2022·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →