USD913979SActiveUtility

Inner shield for a substrate processing chamber

87
Assignee: APPLIED MATERIALS INCPriority: Aug 28, 2019Filed: Aug 28, 2019Granted: Mar 23, 2021
Est. expiryAug 28, 2039(~13.1 yrs left)· nominal 20-yr term from priority
Inventors:Sarath BabuAnanthkrishna JupudiYueh Sheng OwJunqi WeiKelvin BohYuichi WadaKang Zhang
87
PatentIndex Score
27
Cited by
27
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an inner shield for a substrate processing chamber, as shown and described.

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