Inventor · disambiguated record
Ananthkrishna Jupudi
Also filed as: JUPUDI ANANTHKRISHNA
44 granted patents·12 pending applications·126 citations·filing 2011–2024
97Inventor score
Top patents by PatentIndex Score
56 records- 0194US8895450B2Low resistivity tungsten PVD with enhanced ionization and RF power couplingAPPLIED MATERIALS INC·Filed 2013·Granted Nov 25, 2014·16 cites·13 claims
- 0294US8558299B2Semiconductor device with gate electrode stack including low resistivity tungsten and method of formingCAO YONG·Filed 2011·Granted Oct 15, 2013·26 cites·4 claims
- 0393US10851453B2Methods and apparatus for shutter disk assembly detectionAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·11 cites·20 claims
- 0488US11361981B2Batch substrate support with warped substrate capabilityAPPLIED MATERIALS INC·Filed 2018·Granted Jun 14, 2022·8 cites·20 claims
- 0587USD913979SInner shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Mar 23, 2021·27 cites·1 claims
- 0686US10629430B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2018·Granted Apr 21, 2020·4 cites·22 claims
- 0785US11251028B2Pre-clean chamber with integrated shutter garageAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·4 cites·17 claims
- 0883US12148629B2Shutter diskAPPLIED MATERIALS INC·Filed 2023·Granted Nov 19, 2024·0 cites·10 claims
- 0980US11328929B2Methods, apparatuses and systems for substrate processing for lowering contact resistanceAPPLIED MATERIALS INC·Filed 2019·Granted May 10, 2022·2 cites·13 claims
- 1078US9960035B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2017·Granted May 1, 2018·2 cites·20 claims
- 1177US9548200B2Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabricationsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 17, 2017·3 cites·18 claims
- 1276US9252002B2Two piece shutter disk assembly for a substrate process chamberTSAI CHENG-HSIUNG MATTHEW·Filed 2012·Granted Feb 2, 2016·5 cites·19 claims
- 1375US9340866B2Substrate support with radio frequency (RF) return pathRITCHIE ALAN·Filed 2012·Granted May 17, 2016·3 cites·20 claims
- 1474US11862480B2Shutter diskAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·9 claims
- 1572US11043406B2Two piece shutter disk assembly with self-centering featureAPPLIED MATERIALS INC·Filed 2019·Granted Jun 22, 2021·1 cites·18 claims
- 1671USD973609SUpper shield with showerhead for a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Dec 27, 2022·5 cites·1 claims
- 1768US11171017B2Shutter diskAPPLIED MATERIALS INC·Filed 2020·Granted Nov 9, 2021·0 cites·12 claims
- 1865US11784075B2Batch substrate support with warped substrate capabilityAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·0 cites·19 claims
- 1964US11670513B2Apparatus and systems for substrate processing for lowering contact resistanceAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·0 cites·18 claims
- 2064US10945313B2Methods and apparatus for a microwave batch curing processAPPLIED MATERIALS INC·Filed 2016·Granted Mar 9, 2021·1 cites·20 claims
- 2164US10373860B2Batch processing apparatusAPPLIED MATERIALS INC·Filed 2015·Granted Aug 6, 2019·1 cites·20 claims
- 2263US10971383B2Fluorescence based thermometry for packaging applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 6, 2021·0 cites·11 claims
- 2362US2025385079A1Heated Process Kit for Substrate ProcessingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2458US9960023B2Methods and apparatus for nodule control in a titanium-tungsten targetAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·0 cites·16 claims
- 2557USD931241SLower shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Sep 21, 2021·5 cites·1 claims
- 2657US2025054737A1Electrostatic Chuck with High Cooling EfficiencyAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2756US2025015733A1Finger Electrostatic Chuck for High Resistance Substrate ChuckingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2855US12237186B2On-board cleaning of tooling parts in hybrid bonding toolAPPLIED MATERIALS INC·Filed 2022·Granted Feb 25, 2025·0 cites·14 claims
- 2954US12080522B2Preclean chamber upper shield with showerheadAPPLIED MATERIALS INC·Filed 2020·Granted Sep 3, 2024·0 cites·19 claims
- 3054US2024266200A1Electrostatic ChuckAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3154US2024395514A1Multi-chamber processing tool with enhanced throughputAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3253US11630001B2Apparatus for measuring temperature in a vacuum and microwave environmentAPPLIED MATERIALS INC·Filed 2020·Granted Apr 18, 2023·0 cites·20 claims
- 3353US11476097B2Common electrostatic chuck for differing substratesAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·0 cites·18 claims
- 3453US11289357B2Methods and apparatus for high voltage electrostatic chuck protectionAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·0 cites·20 claims
- 3552US11929260B2Low warpage curing methodology by inducing curvatureAPPLIED MATERIALS INC·Filed 2021·Granted Mar 12, 2024·0 cites·20 claims
- 3652USD967081SMicrowave transmission window assemblyAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·2 cites·1 claims
- 3751US11881385B2Methods and apparatus for reducing defects in preclean chambersAPPLIED MATERIALS INC·Filed 2020·Granted Jan 23, 2024·0 cites·20 claims
- 3851US10950475B1Method and apparatus for processing a substrate using non-contact temperature measurementAPPLIED MATERIALS INC·Filed 2019·Granted Mar 16, 2021·0 cites·17 claims
- 3951US2023343615A1In-situ low temperature measurement of low emissivity substratesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4050US11870202B2Solid-state power amplifiers with cooling capabilitiesAPPLIED MATERIALS INC·Filed 2020·Granted Jan 9, 2024·0 cites·14 claims
- 4150US11629409B2Inline microwave batch degas chamberAPPLIED MATERIALS INC·Filed 2019·Granted Apr 18, 2023·0 cites·20 claims
- 4250US11375584B2Methods and apparatus for processing a substrate using microwave energyAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·0 cites·20 claims
- 4349US11670525B2Methods and apparatus for microwave leakage reduction for semiconductor process chambersAPPLIED MATERIALS INC·Filed 2019·Granted Jun 6, 2023·0 cites·18 claims
- 4448US10677830B2Methods and apparatus for detecting microwave fields in a cavityAPPLIED MATERIALS INC·Filed 2017·Granted Jun 9, 2020·0 cites·20 claims
- 4548US10600664B2Fluorescence based thermometry for packaging applicationsAPPLIED MATERIALS INC·Filed 2017·Granted Mar 24, 2020·0 cites·16 claims
- 4648US2022406643A1Semitransparent substrate support for microwave degas chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4746US12100577B2High conductance inner shield for process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Sep 24, 2024·0 cites·20 claims
- 4845US11699634B2Water cooled plate for heat management in power amplifiersAPPLIED MATERIALS INC·Filed 2019·Granted Jul 11, 2023·0 cites·18 claims
- 4945US2021066051A1High conductance lower shield for process chamberAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 5044US11362404B2Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second platesAPPLIED MATERIALS INC·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →