Inventor
Chang xue yang
US11 patents
Patents
11 patentsUSD1049067SOct 29, 2024
Ring for an anti-rotation process kit for a substrate processing chamber
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USD1066275SMar 11, 2025
Baffle for anti-rotation process kit for substrate processing chamber
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US12020977B2Jun 25, 2024
Lift pin assembly
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US10381200B2Aug 13, 2019
Plasma chamber with tandem processing regions
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US12341048B2Jun 24, 2025
Porous plug for electrostatic chuck gas delivery
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US11069547B2Jul 20, 2021
In-situ temperature measurement for inside of process chamber
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US10847351B2Nov 24, 2020
Plasma chamber with tandem processing regions
APPLIED MATERIALS INC0 citations51
US10811233B2Oct 20, 2020
Process chamber having tunable showerhead and tunable liner
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US12211734B2Jan 28, 2025
Lift pin mechanism
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US12100576B2Sep 24, 2024
Metal oxide preclean chamber with improved selectivity and flow conductance
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US12198903B2Jan 14, 2025
Plasma resistant arc preventative coatings for manufacturing equipment components
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