Inventor · disambiguated record
Jeffrey Bogart
Also filed as: BOGART JEFFREY · BOGART JEFFREY A
6 granted patents·4 pending applications·45 citations·filing 2002–2015
81Inventor score
Top patents by PatentIndex Score
10 records- 0189US7550070B2Electrode and pad assembly for processing conductive layersNOVELLUS SYSTEMS INC·Filed 2006·Granted Jun 23, 2009·8 cites·21 claims
- 0272US7238092B2Low-force electrochemical mechanical processing method and apparatusNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 3, 2007·16 cites·31 claims
- 0365US7211174B2Method and system to provide electrical contacts for electrotreating processesNOVELLUS SYSTEMS INC·Filed 2002·Granted May 1, 2007·10 cites·16 claims
- 0457US7141146B2Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surfaceASM NUTOOL INC·Filed 2004·Granted Nov 28, 2006·6 cites·8 claims
- 0557US6967166B2Method for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processingASM NUTOOL INC·Filed 2002·Granted Nov 22, 2005·5 cites·39 claims
- 0653US10074521B2Replaceable upper chamber parts of plasma processing apparatusLAM RES CORP·Filed 2015·Granted Sep 11, 2018·0 cites·20 claims
- 0747US2006096702A1Apparatus for monitoring and controlling force applied on workpiece surface during electrochemical mechanical processingBASOL BULENT M·Filed 2005·Application pending·0 cites
- 0843US2007131563A1Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surfaceASM NUTOOL INC·Filed 2006·Application pending·0 cites
- 0940US2004182715A1Process and apparatus for air bubble removal during electrochemical processingFiled 2003·Application pending·0 cites
- 1040US2006131177A1Means to eliminate bubble entrapment during electrochemical processing of workpiece surfaceBOGART JEFFREY·Filed 2005·Application pending·0 cites
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