Inventor · disambiguated record
Igor Fidelman
Also filed as: FIDELMAN IGOR
3 granted patents·1 pending application·50 citations·filing 1998–2024
72Inventor score
Top patents by PatentIndex Score
4 records- 0183US7977258B2Method and system for thermally processing a plurality of wafer-shaped objectsMATTSON TECH INC·Filed 2007·Granted Jul 12, 2011·11 cites·69 claims
- 0261US2025299910A1Charged particle processing systemMULTIBEAM CORP·Filed 2024·Application pending·0 cites
- 0355US6284051B1Cooled windowASSOCIATES ISRAEL LTD AG·Filed 1999·Granted Sep 4, 2001·24 cites·10 claims
- 0442US6084213AMethod and apparatus for increasing temperature uniformity of heated wafersSTEAG C V D SYTEMS LTD·Filed 1998·Granted Jul 4, 2000·15 cites·26 claims
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