Inventor · disambiguated record
Robert Sculac
Also filed as: SCULAC ROBERT · SCULAC ROBERT ANTHONY
8 granted patents·7 pending applications·38 citations·filing 2008–2021
82Inventor score
Files withINTERMOLECULAR INC8LAM RES CORP2INTERMOLLECULAR INC1LOWE JEFFREY CHIH-HOU1MARISERLA SANDEEP1
Top patents by PatentIndex Score
15 records- 0191US7955990B2Method for improved thickness repeatability of PECVD deposited carbon filmsNOVELLUS SYSTEMS INC·Filed 2008·Granted Jun 7, 2011·26 cites·17 claims
- 0286US11024531B2Optimized low energy / high productivity deposition systemLAM RES CORP·Filed 2018·Granted Jun 1, 2021·4 cites·16 claims
- 0373US8893923B2Methods and systems for dispensing different liquids for high productivity combinatorial processingINTERMOLECULAR INC·Filed 2012·Granted Nov 25, 2014·3 cites·19 claims
- 0469US8663397B1Processing and cleaning substratesINTERMOLECULAR INC·Filed 2012·Granted Mar 4, 2014·2 cites·6 claims
- 0567US9097388B2Effluent management, waste dilution, effluent pre-dilution, acid waste handlingMARISERLA SANDEEP·Filed 2012·Granted Aug 4, 2015·3 cites·6 claims
- 0666US12322641B2Mechanical indexer for multi-station process moduleLAM RES CORP·Filed 2021·Granted Jun 3, 2025·0 cites·9 claims
- 0749US2014174481A1Processing and Cleaning SubstratesINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 0847US8835329B2Reactor cell isolation using differential pressure in a combinatorial reactorINTERMOLECULAR INC·Filed 2012·Granted Sep 16, 2014·0 cites·20 claims
- 0943US2016118309A1Minimal Contact Wet Processing Systems and MethodsINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 1042US2016111302A1Systems and Methods for Wet Processing Substrates with Rotating Splash ShieldINTERMOLECULAR INC·Filed 2014·Application pending·0 cites
- 1139US2014170857A1Customizing Etch Selectivity with Sequential Multi-Stage Etches with Complementary EtchantsINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1238US2014144471A1Contamination Control, Rinsing, and Purging Methods to Extend the Life of Components within Combinatorial Processing SystemsINTERMOLLECULAR INC·Filed 2012·Application pending·0 cites
- 1337US2013115779A1Conical Sleeves For ReactorsINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1435US8807550B2Method and apparatus for controlling force between reactor and substrateLOWE JEFFREY CHIH-HOU·Filed 2011·Granted Aug 19, 2014·0 cites·14 claims
- 1535US2013156530A1Method and apparatus for reducing contamination of substrateSCULAC ROBERT·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →