Inventor · disambiguated record
Justin Quarantello
Also filed as: QUARANTELLO JUSTIN · QUARANTELLO JUSTIN M
4 granted patents·1 pending application·297 citations·filing 2001–2006
77Inventor score
Top patents by PatentIndex Score
5 records- 0195US7115017B1Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarizationNOVELLUS SYSTEMS INC·Filed 2006·Granted Oct 3, 2006·272 cites·21 claims
- 0289US7264537B1Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring systemNOVELLUS SYSTEMS INC·Filed 2006·Granted Sep 4, 2007·19 cites·21 claims
- 0355US6892472B2Method and apparatus for cleaning and drying a workpieceNOVELLUS SYSTEMS INC·Filed 2003·Granted May 17, 2005·6 cites·28 claims
- 0437US7622052B1Methods for chemical mechanical planarization and for detecting endpoint of a CMP operationNOVELLUS SYSTEMS INC·Filed 2006·Granted Nov 24, 2009·0 cites·10 claims
- 0532US2002170574A1Differential Cleaning for semiconductor wafers with copper circuitrySPEEDFAM IPEC CORP·Filed 2001·Application pending·0 cites
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