Inventor · disambiguated record
Didem Ernur
Also filed as: ERNUR DIDEM
4 granted patents·3 pending applications·7 citations·filing 2005–2024
62Inventor score
Top patents by PatentIndex Score
7 records- 0174US8080505B2Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metalsERNUR DIDEM·Filed 2009·Granted Dec 20, 2011·7 cites·24 claims
- 0266US2024360554A1Solid source chemical vaporizerASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0356US2025038006A1Method for forming a molybdenum silicide layer on a surface of a substrateERNUR DIDEM·Filed 2024·Application pending·0 cites
- 0456US2024044003A1Wafer boat and a method for forming layer on a plurality of substratesASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0544US7589052B2Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metalsIMEC·Filed 2005·Granted Sep 15, 2009·0 cites·33 claims
- 0642US8722527B2Integrated circuit manufacturing method and integrated circuitERNUR DIDEM·Filed 2009·Granted May 13, 2014·0 cites·12 claims
- 0736US8330238B2Microscopic structure packaging method and device with packaged microscopic structureVAN WINGERDEN JOHANNES·Filed 2010·Granted Dec 11, 2012·0 cites·14 claims
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