Inventor · disambiguated record
Steven Thomas Coyle
Also filed as: COYLE STEVEN · COYLE STEVEN G · COYLE STEVEN T · COYLE STEVEN THOMAS
25 granted patents·5 pending applications·378 citations·filing 1999–2021
96Inventor score
Files withAPPLIED MATERIALS INC11GATAN INC11COYLE STEVEN THOMAS4APPLIED MATRIALS INC1BULLER BENYAMIN1
Top patents by PatentIndex Score
30 records- 0197US7015467B2Generating electrons with an activated photocathodeAPPLIED MATERIALS INC·Filed 2003·Granted Mar 21, 2006·84 cites·30 claims
- 0296US7446474B2Hetero-junction electron emitter with Group III nitride and activated alkali halideAPPLIED MATERIALS INC·Filed 2005·Granted Nov 4, 2008·50 cites·22 claims
- 0396US6429443B1Multiple beam electron beam lithography systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 6, 2002·90 cites·9 claims
- 0491US6724002B2Multiple electron beam lithography system with multiple beam modulated laser illuminationAPPLIED MATERIALS INC·Filed 2002·Granted Apr 20, 2004·41 cites·12 claims
- 0585US8384050B2Ion beam sample preparation thermal management apparatus and methodsGATAN INC·Filed 2011·Granted Feb 26, 2013·5 cites·39 claims
- 0685US7372195B2Electron beam source having an extraction electrode provided with a magnetic disk elementAPPLIED MATERIALS INC·Filed 2005·Granted May 13, 2008·9 cites·22 claims
- 0784US8283642B2Ion beam sample preparation apparatus and methodsCOYLE STEVEN THOMAS·Filed 2011·Granted Oct 9, 2012·6 cites·26 claims
- 0883US7427765B2Electron beam column for writing shaped electron beamsJEOL LTD·Filed 2005·Granted Sep 23, 2008·6 cites·18 claims
- 0980US7301263B2Multiple electron beam system with electron transmission gatesAPPLIED MATERIALS INC·Filed 2004·Granted Nov 27, 2007·15 cites·40 claims
- 1079US8791438B2Ion beam sample preparation apparatus and methodsGATAN INC·Filed 2013·Granted Jul 29, 2014·4 cites·20 claims
- 1179US8445874B2Ion beam sample preparation apparatus and methodsCOYLE STEVEN THOMAS·Filed 2011·Granted May 21, 2013·4 cites·41 claims
- 1279US7800075B2Multi-function module for an electron beam columnBULLER BENYAMIN·Filed 2008·Granted Sep 21, 2010·4 cites·12 claims
- 1376US7161162B2Electron beam pattern generator with photocathode comprising low work function cesium halideAPPLIED MATERIALS INC·Filed 2002·Granted Jan 9, 2007·11 cites·31 claims
- 1475US6399934B1Optical coupling to gated photocathodesAPPLIED MATERIALS INC·Filed 2000·Granted Jun 4, 2002·11 cites·22 claims
- 1572US8592763B2Ion beam sample preparation apparatus and methodsCOYLE STEVEN THOMAS·Filed 2012·Granted Nov 26, 2013·2 cites·4 claims
- 1667US10110854B2Ion beam sample preparation apparatus and methodsGATAN INC·Filed 2013·Granted Oct 23, 2018·2 cites·20 claims
- 1767US8610090B2Ion beam sample preparation thermal management apparatus and methodsGATAN INC·Filed 2012·Granted Dec 17, 2013·1 cites·22 claims
- 1867US6376984B1Patterned heat conducting photocathode for electron beam sourceAPPLIED MATERIALS INC·Filed 1999·Granted Apr 23, 2002·19 cites·20 claims
- 1958US6759800B1Diamond supported photocathodes for electron sourcesAPPLIED MATERIALS INC·Filed 1999·Granted Jul 6, 2004·13 cites·14 claims
- 2058US2014077106A1Ion Beam Sample Preparation Thermal Management Apparatus and MethodsGATAN INC·Filed 2013·Application pending·0 cites
- 2156US9196455B2Ion beam sample preparation apparatus and methodsGATAN INC·Filed 2014·Granted Nov 24, 2015·0 cites·22 claims
- 2256US8729510B2Ion beam sample preparation apparatus and methodsGATAN INC·Filed 2013·Granted May 20, 2014·0 cites·25 claims
- 2355US2023373028A1Apparatus and method for semiconductor package failure analysisGATAN INC·Filed 2021·Application pending·0 cites
- 2447US6847164B2Current-stabilizing illumination of photocathode electron beam sourceAPPLIED MATRIALS INC·Filed 2002·Granted Jan 25, 2005·1 cites·10 claims
- 2545US2023311244A1Apparatus and method for semiconductor package failure analysisGATAN INC·Filed 2021·Application pending·0 cites
- 2642US8653489B2Ion beam sample preparation apparatus and methodsCOYLE STEVEN THOMAS·Filed 2011·Granted Feb 18, 2014·0 cites·46 claims
- 2740US2002034920A1Cold pack stuff toyFiled 2001·Application pending·0 cites
- 2839US11004656B2Methods and apparatus for determining, using, and indicating ion beam working propertiesGATAN INC·Filed 2015·Granted May 11, 2021·0 cites·15 claims
- 2936US2002145113A1Optical signal transmission for electron beam imaging apparatusAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 3030US10731246B2Ion beam sample preparation and coating apparatus and methodsGATAN INC·Filed 2015·Granted Aug 4, 2020·0 cites·13 claims
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