Inventor · disambiguated record
Kalyanjit Ghosh
Also filed as: GHOSH KALYANJIT
26 granted patents·5 pending applications·52 citations·filing 2013–2024
94Inventor score
Top patents by PatentIndex Score
31 records- 0194US10490436B2Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide filmsAPPLIED MATERIALS INC·Filed 2016·Granted Nov 26, 2019·10 cites·16 claims
- 0293US11078568B2Pumping apparatus and method for substrate processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted Aug 3, 2021·4 cites·20 claims
- 0391US10889894B2Faceplate with embedded heaterAPPLIED MATERIALS INC·Filed 2019·Granted Jan 12, 2021·7 cites·20 claims
- 0488US11031262B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2020·Granted Jun 8, 2021·2 cites·20 claims
- 0588US10312076B2Application of bottom purge to increase clean efficiencyAPPLIED MATERIALS INC·Filed 2018·Granted Jun 4, 2019·5 cites·20 claims
- 0687US10600624B2System and method for substrate processing chambersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·5 cites·22 claims
- 0786US9123758B2Gas injection apparatus and substrate process chamber incorporating sameAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2015·7 cites·18 claims
- 0885US11952660B2Semiconductor processing chambers and methods for cleaning the sameAPPLIED MATERIALS INC·Filed 2020·Granted Apr 9, 2024·1 cites·11 claims
- 0983US2024247371A1Semiconductor processing chambers and methods for cleaning the sameAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1080US10636628B2Method for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Apr 28, 2020·2 cites·13 claims
- 1179US10113231B2Process kit including flow isolator ringAPPLIED MATERIALS INC·Filed 2016·Granted Oct 30, 2018·1 cites·18 claims
- 1277US11047043B2Chamber liner for high temperature processingAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·0 cites·18 claims
- 1377US10612135B2Method and system for high temperature cleanAPPLIED MATERIALS INC·Filed 2017·Granted Apr 7, 2020·2 cites·20 claims
- 1476US12087555B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2022·Granted Sep 10, 2024·0 cites·12 claims
- 1576US11512391B2Process kit for a high throughput processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 1675US11508611B2Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide filmsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 22, 2022·1 cites·20 claims
- 1774US10636684B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2019·Granted Apr 28, 2020·1 cites·20 claims
- 1872US10232324B2Gas mixing apparatusAPPLIED MATERIALS INC·Filed 2013·Granted Mar 19, 2019·3 cites·17 claims
- 1969US10403515B2Loadlock integrated bevel etcher systemAPPLIED MATERIALS INC·Filed 2016·Granted Sep 3, 2019·1 cites·13 claims
- 2067US10480068B2Chamber liner for high temperature processingAPPLIED MATERIALS INC·Filed 2017·Granted Nov 19, 2019·0 cites·19 claims
- 2166US11532462B2Method and system for cleaning a process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Dec 20, 2022·0 cites·20 claims
- 2263US10724138B2Process kit for a high throughput processing chamberAPPLIED MATERIALS INC·Filed 2018·Granted Jul 28, 2020·0 cites·19 claims
- 2361US12044704B2Method of centering probe head in mounting frameFORMFACTOR INC·Filed 2022·Granted Jul 23, 2024·0 cites·4 claims
- 2460US10907252B2Horizontal heat choke faceplate designAPPLIED MATERIALS INC·Filed 2018·Granted Feb 2, 2021·0 cites·19 claims
- 2557US10017855B2Process kit for a high throughput processing chamberAPPLIED MATERIALS INC·Filed 2015·Granted Jul 10, 2018·0 cites·13 claims
- 2653US10217650B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2016·Granted Feb 26, 2019·0 cites·13 claims
- 2752US2019226089A1High temperature faceplate with hybrid material designAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2852US2019226088A1High temperature faceplate with thermal choke and coolingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2951US9443714B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2013·Granted Sep 13, 2016·0 cites·18 claims
- 3042US2020098547A1Gas distribution assemblies and operation thereofAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3140US2019226087A1Heated ceramic faceplateAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
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