Inventor · disambiguated record
Naoto Yoshitaka
Also filed as: YOSHITAKA NAOTO
16 granted patents·9 pending applications·83 citations·filing 2004–2016
92Inventor score
Top patents by PatentIndex Score
25 records- 0190US8578953B2Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTAKIGUCHI YASUSHI·Filed 2007·Granted Nov 12, 2013·17 cites·21 claims
- 0284US9716002B2Substrate cleaning methodTOKYO ELECTRON LTD·Filed 2016·Granted Jul 25, 2017·3 cites·15 claims
- 0384US7919727B2Laser processing apparatus and laser processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Apr 5, 2011·10 cites·6 claims
- 0484US7710582B2Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrateTOKYO ELECTRON LTD·Filed 2005·Granted May 4, 2010·11 cites·15 claims
- 0584US7473321B2Laser treatment apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Jan 6, 2009·9 cites·4 claims
- 0679US9120120B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumTOKYO ELECTRON LTD·Filed 2014·Granted Sep 1, 2015·4 cites·6 claims
- 0779US7622000B2Laser processing apparatus and laser processing methodTOKYO ELECTRON LTD·Filed 2005·Granted Nov 24, 2009·7 cites·8 claims
- 0877US7518087B2Laser processing apparatus and laser processing methodTOKYO ELECTRON LTD·Filed 2005·Granted Apr 14, 2009·5 cites·13 claims
- 0975US8851092B2Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing mediumYAMAMOTO TARO·Filed 2009·Granted Oct 7, 2014·5 cites·10 claims
- 1069US8088455B2Laser treatment apparatusKOGA NORIHISA·Filed 2008·Granted Jan 3, 2012·3 cites·2 claims
- 1168US9960069B2Joining device and joining systemTOKYO ELECTRON LTD·Filed 2014·Granted May 1, 2018·2 cites·9 claims
- 1267US9919509B2Peeling device, peeling system and peeling methodHIRAKAWA OSAMU·Filed 2011·Granted Mar 20, 2018·2 cites·17 claims
- 1367US8819923B2Joint apparatusNISHIBAYASHI TAKAHIRO·Filed 2011·Granted Sep 2, 2014·3 cites·16 claims
- 1464US9330898B2Separation system, separation method, program and computer storage mediumHIRAKAWA OSAMU·Filed 2011·Granted May 3, 2016·2 cites·7 claims
- 1553US2014102474A1Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1648US2014284000A1Separation apparatus, separation system, separation method and non-transitory computer readable storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1744US9607869B2Bonding systemTOKYO ELECTRON LTD·Filed 2014·Granted Mar 28, 2017·0 cites·7 claims
- 1844US2013000684A1Cleaning method and cleaning apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 1942US2014208556A1Joining device and joining systemTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 2038US2013062013A1Joint apparatus, joint system, and joint methodOKADA SHINJI·Filed 2012·Application pending·0 cites
- 2138US2013133828A1Bonding apparatus, bonding system and bonding methodTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 2238US2004197433A1Film removing apparatus, film removing method and substrate processing systemFiled 2004·Application pending·0 cites
- 2337US2014158303A1Bonding system, substrate processing system, and bonding methodHIRAKAWA OSAMU·Filed 2012·Application pending·0 cites
- 2434US2013153116A1Joint system, substrate processing system, and joint methodHIRAKAWA OSAMU·Filed 2011·Application pending·0 cites
- 2530US9165758B2Peeling system, peeling method, and computer storage mediumYOSHITAKA NAOTO·Filed 2011·Granted Oct 20, 2015·0 cites·19 claims
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