Inventor · disambiguated record
Joost André Klugkist
Also filed as: KLUGKIST JOOST ANDRÉ
4 granted patents·2 pending applications·0 citations·filing 2016–2022
52Inventor score
Top patents by PatentIndex Score
6 records- 0157US12411424B2Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an objectASML NETHERLANDS BV·Filed 2022·Granted Sep 9, 2025·0 cites·20 claims
- 0256US12422758B2Lithographic apparatus, temperature sensor, and fiber Bragg grating sensorASML HOLDING NV·Filed 2022·Granted Sep 23, 2025·0 cites·17 claims
- 0348US10976196B2Sensor mark and a method of manufacturing a sensor markASML NETHERLANDS BV·Filed 2018·Granted Apr 13, 2021·0 cites·20 claims
- 0447US11143975B2Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling offASML NETHERLANDS BV·Filed 2017·Granted Oct 12, 2021·0 cites·23 claims
- 0545US2025085172A9Temperature measurement of optical elements in an optical apparatusASML NETHERLAND BV·Filed 2022·Application pending·0 cites
- 0631US2018299792A1Filter, method of formation thereof, and image sensorASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
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