Inventor · disambiguated record
Alexander Slobodov
Also filed as: SLOBODOV ALEXANDER
8 granted patents·26 citations·filing 2005–2013
81Inventor score
Top patents by PatentIndex Score
8 records- 0183US7414715B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturationKLA TENCOR TECH CORP·Filed 2005·Granted Aug 19, 2008·8 cites·10 claims
- 0279US7777875B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturationKLA TENCOR TECH CORP·Filed 2008·Granted Aug 17, 2010·4 cites·9 claims
- 0377US8139840B1Inspection system and method for high-speed serial data transferCHU YUNXIAN·Filed 2008·Granted Mar 20, 2012·11 cites·25 claims
- 0466US9091666B2Extended defect sizing range for wafer inspectionCAI ZHONGPING·Filed 2012·Granted Jul 28, 2015·2 cites·21 claims
- 0564US7423250B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturationKLA TENCOR TECH CORP·Filed 2005·Granted Sep 9, 2008·1 cites·26 claims
- 0648US7746462B2Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear rangeKLA TENCOR TECH CORP·Filed 2007·Granted Jun 29, 2010·0 cites·25 claims
- 0746US9587936B2Scanning inspection system with angular correctionKLA TENCOR CORP·Filed 2013·Granted Mar 7, 2017·0 cites·21 claims
- 0842US9810619B2Method and system for simultaneous tilt and height control of a substrate surface in an inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 7, 2017·0 cites·45 claims
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