Inventor

RICE MICHAEL R

US129 patents

⚠️ This page may combine multiple inventors who share the name “RICE MICHAEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RICE MICHAEL R

APPLIED MATERIALS INC

Distributed electrode array for plasma processing

Substrate carrier having door latching and substrate clamping mechanisms

Break-away positioning conveyor mount for accommodating conveyor belt bends

Extended mainframe designs for semiconductor device manufacturing equipment

Substrate carrier having door latching and substrate clamping mechanisms

Methods and apparatus for transporting substrate carriers

Systems and methods for transferring small lot size substrate carriers between processing tools

Dynamically balanced substrate carrier handler

Side storage pods, equipment front end modules, and methods for processing substrates

Cartesian cluster tool configuration for lithography type processes

Calibration of high speed loader to substrate transport system

Monitoring of smart pin transition timing

Mainframe of substrate processing system

Mainframe of substrate processing system

Systems for integrating load locks into a factory interface footprint space

Mainframe of substrate processing system

Mainframe of substrate processing system

Wafer edge ring lifting solution

Substrate processing apparatus and methods with factory interface chamber filter purge

Flourination process to create sacrificial oxy-flouride layer

Zone-controlled rare-earth oxide ALD and CVD coatings

Distributed electrode array for plasma processing

Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls

Process for wafer backside polymer removal and wafer front side photoresist removal

Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback

Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event

Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck

Substrate support with switchable multizone heater

Apparatus and method for optical calibration of wafer placement by a robot

Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

Scheduling method for processing equipment

Batch processing platform for ALD and CVD

Scheduling method for processing equipment

Mainframe of dual-robot substrate processing system

Systems and methods for transferring small lot size substrate carriers between processing tools

Break-away positioning conveyor mount for accommodating conveyor belt bends

INTELLICALL INC

Method and apparatus for performing an automated collect call

Method and apparatus for performing an automated collect call

Short time validity storage of a billing account number at a local telecommunications station

Automatic generation of billing records at a telephone paystation

Automatic validation of telephone account numbers

Method and apparatus for performing an automated collect call

Method and apparatus for altering the access format of telephone calls

Short time validity storage

Method and apparatus for downloading speech files

APPLIED MATERIAL INC

Methods and apparatus for transporting substrate carriers

FIRST CITY TEXAS DALLAS

Method and apparatus for performing an automated collect call

HUDGENS JEFFREY C

End effector for a cluster tool

PORTHOUSE KEITH BRIAN

Methods and apparatus for processing substrates using model-based control

RICE MICHAEL R

Dual-mode robot systems and methods for electronic device manufacturing