Inventor
SONG JIAO
SG11 patents
⚠️ This page may combine multiple inventors who share the name “SONG JIAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUSD966357SOct 11, 2022
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC21 citations93
USD940765SJan 11, 2022
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC19 citations93
USD933726SOct 19, 2021
Deposition ring for a semiconductor processing chamber
APPLIED MATERIALS INC40 citations92
USD1007449SDec 12, 2023
Target profile for a physical vapor deposition chamber target
APPLIED MATERIALS INC6 citations83
US11846013B2Dec 19, 2023
Methods and apparatus for extended chamber for through silicon via deposition
APPLIED MATERIALS INC2 citations71
US11189472B2Nov 30, 2021
Cathode assembly having a dual position magnetron and centrally fed coolant
APPLIED MATERIALS INC0 citations56
US9978639B2May 22, 2018
Methods for reducing copper overhang in a feature of a substrate
APPLIED MATERIALS INC0 citations51
US11581166B2Feb 14, 2023
Low profile deposition ring for enhanced life
APPLIED MATERIALS INC0 citations50
US11295938B2Apr 5, 2022
Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof
APPLIED MATERIALS INC0 citations50
US11784033B2Oct 10, 2023
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations46