Inventor · disambiguated record
Rainer Schierle
Also filed as: SCHIERLE RAINER
7 granted patents·1 pending application·91 citations·filing 2000–2014
86Inventor score
Top patents by PatentIndex Score
8 records- 0188US7173715B2Reduced coherence symmetric grazing incidence differential interferometerKLA TENCOR CORP·Filed 2005·Granted Feb 6, 2007·11 cites·20 claims
- 0287US7719294B1Systems configured to perform a non-contact method for determining a property of a specimenKLA TENCOR TECH CORP·Filed 2006·Granted May 18, 2010·10 cites·23 claims
- 0387US7248062B1Contactless charge measurement of product wafers and control of corona generation and depositionKLA TENCOR TECH CORP·Filed 2003·Granted Jul 24, 2007·30 cites·19 claims
- 0487US7057741B1Reduced coherence symmetric grazing incidence differential interferometerKLA TENCOR CORP·Filed 2000·Granted Jun 6, 2006·31 cites·23 claims
- 0574US7538333B1Contactless charge measurement of product wafers and control of corona generation and depositionKLA TENCOR TECH CORP·Filed 2006·Granted May 26, 2009·3 cites·18 claims
- 0671US8786842B2Grazing and normal incidence interferometer having common reference surfaceMULLER DIETER·Filed 2007·Granted Jul 22, 2014·5 cites·20 claims
- 0767US9273952B2Grazing and normal incidence interferometer having common reference surfaceKLA TENCOR CORP·Filed 2014·Granted Mar 1, 2016·1 cites·20 claims
- 0839US2007044642A1Method and device for pattern recognition in acoustic recordingsSCHIERLE RAINER·Filed 2006·Application pending·0 cites
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