Inventor · disambiguated record
Youssef Karel Maria De Vos
Also filed as: DE VOS YOUSSEF KAREL MARIA
15 granted patents·2 pending applications·76 citations·filing 2004–2023
91Inventor score
Files withASML NETHERLANDS BV12HEMPENIUS PETER PAUL2BUTLER HANS1DE VOS YOUSSEF KAREL MARIA1VERVOORDELDONK MICHAEL JOHANNES1
Top patents by PatentIndex Score
17 records- 0190US7742149B2Stage system and lithographic apparatus comprising such a stage systemASML NETHERLANDS BV·Filed 2008·Granted Jun 22, 2010·15 cites·5 claims
- 0289US7782446B2Stage system and lithographic apparatus comprising such stage systemASML NETHERLANDS BV·Filed 2007·Granted Aug 24, 2010·13 cites·31 claims
- 0382US8885147B2Lithographic apparatus and device manufacturing methodVERVOORDELDONK MICHAEL JOHANNES·Filed 2010·Granted Nov 11, 2014·5 cites·20 claims
- 0477US9946172B2System for positioning an object in lithographyASML NETHERLANDS BV·Filed 2014·Granted Apr 17, 2018·2 cites·20 claims
- 0576US7884919B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Feb 8, 2011·4 cites·39 claims
- 0674US10191396B2Lithographic apparatus, object positioning system and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jan 29, 2019·2 cites·20 claims
- 0772US11664264B2Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2016·Granted May 30, 2023·2 cites·24 claims
- 0872US7657334B2Lithographic apparatus and control methodASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·3 cites·11 claims
- 0971US9378722B2Lithographic apparatus with actuator to compensate acoustic vibrationBUTLER HANS·Filed 2008·Granted Jun 28, 2016·6 cites·28 claims
- 1071US7969550B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Jun 28, 2011·3 cites·26 claims
- 1171US7256866B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·11 cites·18 claims
- 1270US8928860B2Lithographic apparatus having a chuck with a visco-elastic damping layerHEMPENIUS PETER PAUL·Filed 2009·Granted Jan 6, 2015·4 cites·25 claims
- 1364US2023260820A1Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1458US8310651B2Lithographic apparatus, method and device manufacturing methodHEMPENIUS PETER PAUL·Filed 2009·Granted Nov 13, 2012·1 cites·6 claims
- 1554US7379156B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 27, 2008·5 cites·19 claims
- 1650US2023205101A1Apparatus for use in a metrology process or lithographic processASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1737US8830442B2Servo control system, lithographic apparatus and control methodDE VOS YOUSSEF KAREL MARIA·Filed 2008·Granted Sep 9, 2014·0 cites·17 claims
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