Inventor
ROSENSTEIN MICHAEL
US29 patents
⚠️ This page may combine multiple inventors who share the name “ROSENSTEIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUS5860640AJan 19, 1999
Semiconductor wafer alignment member and clamp ring
APPLIED MATERIALS INC142 citations98
US6221221B1Apr 24, 2001
Apparatus for providing RF return current path control in a semiconductor wafer processing system
APPLIED MATERIALS INC154 citations97
US5690795ANov 25, 1997
Screwless shield assembly for vacuum processing chambers
APPLIED MATERIALS INC139 citations97
US6228236B1May 8, 2001
Sputter magnetron having two rotation diameters
APPLIED MATERIALS INC113 citations95
US6660134B1Dec 9, 2003
Feedthrough overlap coil
APPLIED MATERIALS INC29 citations93
US6730174B2May 4, 2004
Unitary removable shield assembly
APPLIED MATERIALS INC51 citations91
US6669829B2Dec 30, 2003
Shutter disk and blade alignment sensor
APPLIED MATERIALS INC17 citations91
US6776848B2Aug 17, 2004
Motorized chamber lid
APPLIED MATERIALS INC21 citations90
US6589407B1Jul 8, 2003
Aluminum deposition shield
APPLIED MATERIALS INC37 citations88
US7674360B2Mar 9, 2010
Mechanism for varying the spacing between sputter magnetron and target
APPLIED MATERIALS INC12 citations82
US7097744B2Aug 29, 2006
Method and apparatus for controlling darkspace gap in a chamber
APPLIED MATERIALS INC12 citations81
US7148435B2Dec 12, 2006
Build-in LOTO device on equipment breaker panel
APPLIED MATERIALS INC16 citations79
USD442853SMay 29, 2001
Rounded overlap coil
APPLIED MATERIALS INC8 citations74
USD442852SMay 29, 2001
Squared overlap coil
APPLIED MATERIALS INC13 citations74
US6827825B2Dec 7, 2004
Method for detecting the position of a shutter disk in a physical vapor deposition chamber
APPLIED MATERIALS INC12 citations72
US7371285B2May 13, 2008
Motorized chamber lid
APPLIED MATERIALS INC8 citations71
US6688838B2Feb 10, 2004
Cleanroom lift having an articulated arm
APPLIED MATERIALS INC5 citations63
USD450070SNov 6, 2001
Sputtering chamber coil
APPLIED MATERIALS INC2 citations63
USD440582SApr 17, 2001
Sputtering chamber coil
APPLIED MATERIALS INC1 citations52
SOFT ROBOTICS INC
6 patentsUS12053877B2Aug 6, 2024
User-assisted robotic control systems
SOFT ROBOTICS INC4 citations84
US11179856B2Nov 23, 2021
User-assisted robotic control systems
SOFT ROBOTICS INC6 citations83
US11167422B2Nov 9, 2021
User-assisted robotic control systems
SOFT ROBOTICS INC4 citations83
US11660759B2May 30, 2023
User-assisted robotic control systems
SOFT ROBOTICS INC0 citations61
US11173615B2Nov 16, 2021
User-assisted robotic control systems
SOFT ROBOTICS INC0 citations61
US11077562B2Aug 3, 2021
User-assisted robotic control systems
SOFT ROBOTICS INC0 citations61