USD450070SExpiredUtility

Sputtering chamber coil

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Assignee: APPLIED MATERIALS INCPriority: Jul 13, 1998Filed: Jul 13, 1998Granted: Nov 6, 2001
Est. expiryJul 13, 2018(expired)· nominal 20-yr term from priority
Inventors:Praburam GopalrajaZheng XuMichael RosensteinJohn C. Forster
36
PatentIndex Score
2
Cited by
36
References
1
Claims

Claims

exact text as granted — not AI-modified
The design for sputtering chamber coil, as shown and described.

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