USD440582SExpiredUtility

Sputtering chamber coil

33
Assignee: APPLIED MATERIALS INCPriority: Mar 16, 1998Filed: Jul 13, 1998Granted: Apr 17, 2001
Est. expiryMar 16, 2018(expired)· nominal 20-yr term from priority
Inventors:Praburam GopalrajaZheng XuMichael RosensteinJohn C. ForsterPeijun Ding
33
PatentIndex Score
1
Cited by
65
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for sputtering chamber coil, as shown and described.

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