Inventor · disambiguated record
Ralf Hilgers
Also filed as: HILGERS RALF
3 granted patents·2 pending applications·150 citations·filing 2000–2008
73Inventor score
Top patents by PatentIndex Score
5 records- 0193US6392825B1Assembly comprising an optical element and a mountZEISS STIFTUNG·Filed 2000·Granted May 21, 2002·88 cites·36 claims
- 0290US6191898B1Optical imaging device, particularly an objective, with at least one optical elementZEISS STIFTUNG·Filed 2000·Granted Feb 20, 2001·62 cites·12 claims
- 0354US2008212052A1Optical arrangement and projection exposure system for microlithography with passive thermal compensationZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0440US2004207825A1Optical arrangement and projection exposure system for microlithography with passive thermal compensationFiled 2004·Application pending·0 cites
- 0539US7274430B2Optical arrangement and projection exposure system for microlithography with passive thermal compensationZEISS CARL SMT AG·Filed 2001·Granted Sep 25, 2007·0 cites·22 claims
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