Inventor · disambiguated record
Ulrich Pohlmann
Also filed as: POHLMANN ULRICH
10 granted patents·1 pending application·37 citations·filing 2009–2023
84Inventor score
Top patents by PatentIndex Score
11 records- 0194US11209737B1Performance optimized scanning sequence for eBeam metrology and inspectionKLA CORP·Filed 2020·Granted Dec 28, 2021·5 cites·24 claims
- 0294US10473460B2Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signalsKLA TENCOR CORP·Filed 2018·Granted Nov 12, 2019·20 cites·35 claims
- 0392US11862524B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jan 2, 2024·2 cites·20 claims
- 0490US10474040B2Systems and methods for device-correlated overlay metrologyKLA TENCOR CORP·Filed 2018·Granted Nov 12, 2019·4 cites·36 claims
- 0582US9851643B2Apparatus and methods for reticle handling in an EUV reticle inspection toolKLA TENCOR CORP·Filed 2013·Granted Dec 26, 2017·4 cites·17 claims
- 0680US12055859B2Overlay mark design for electron beam overlayKLA CORP·Filed 2023·Granted Aug 6, 2024·0 cites·15 claims
- 0770US11703767B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jul 18, 2023·0 cites·10 claims
- 0856US11720031B2Overlay design for electron beam and scatterometry overlay measurementsKLA CORP·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 0952US8125653B2Apparatus and method for the determination of the position of a disk-shaped objectWENIGER GERT·Filed 2009·Granted Feb 28, 2012·2 cites·9 claims
- 1051US2023284859A1Cleaning pad for treating surfacesPOHLMANN ULRICH·Filed 2021·Application pending·0 cites
- 1149US11637030B2Multi-stage, multi-zone substrate positioning systemsKLA CORP·Filed 2020·Granted Apr 25, 2023·0 cites·28 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →