Inventor · disambiguated record
Joseph Laganza
Also filed as: LAGANZA JOSEPH · LAGANZA JOSEPH L
11 granted patents·1 pending application·190 citations·filing 1983–2007
91Inventor score
Top patents by PatentIndex Score
12 records- 0186US6822731B1Method and apparatus for a pellicle frame with heightened bonding surfacesASML HOLDING NV·Filed 2003·Granted Nov 23, 2004·21 cites·30 claims
- 0284US7278817B2Method for transferring and loading a reticleASML HOLDING NV·Filed 2006·Granted Oct 9, 2007·6 cites·18 claims
- 0383US4719705AReticle transporterPERKIN ELMER CORP·Filed 1986·Granted Jan 19, 1988·40 cites·10 claims
- 0476US7339653B2System for a pellicle frame with heightened bonding surfacesASML HOLDING NV·Filed 2007·Granted Mar 4, 2008·3 cites·6 claims
- 0572US4986007AReticle frame assemblySVG LITHOGRAPHY SYSTEMS INC·Filed 1987·Granted Jan 22, 1991·23 cites·9 claims
- 0669US4530635AWafer transferring chuck assemblyPERKIN ELMER CORP·Filed 1983·Granted Jul 23, 1985·32 cites·6 claims
- 0768US6847434B2Method and apparatus for a pellicle frame with porous filtering insertsASML HOLDING NV·Filed 2002·Granted Jan 25, 2005·9 cites·23 claims
- 0868US5727685AReticle container with corner holdingSVG LITHOGRAPHY SYSTEMS INC·Filed 1996·Granted Mar 17, 1998·46 cites·19 claims
- 0963US7173689B2Method and system for a pellicle frame with heightened bonding surfacesASML HOLDING NV·Filed 2004·Granted Feb 6, 2007·5 cites·20 claims
- 1055US7004715B2Apparatus for transferring and loading a reticle with a robotic reticle end-effectorASML HOLDING NV·Filed 2002·Granted Feb 28, 2006·3 cites·19 claims
- 1150US7136152B2Method for bonding a pellicle to a patterning device and patterning device comprising a pellicleASML HOLDING NV·Filed 2004·Granted Nov 14, 2006·2 cites·16 claims
- 1244US2005151955A1Method and apparatus for a reticle with purged pellicle-to-reticle gapASML HOLDING NV·Filed 2005·Application pending·0 cites
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