Inventor · disambiguated record
Michael J. Van Riet
Also filed as: VAN RIET MICHAEL · VAN RIET MICHAEL J · VAN RIET MICHAEL JOHN
11 granted patents·162 citations·filing 2003–2013
91Inventor score
Top patents by PatentIndex Score
11 records- 0191US9601393B2Selecting one or more parameters for inspection of a waferLEE CHRIS·Filed 2010·Granted Mar 21, 2017·17 cites·69 claims
- 0291US9310316B2Selecting parameters for defect detection methodsWU KENONG·Filed 2012·Granted Apr 12, 2016·15 cites·35 claims
- 0391US8135204B1Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipeCHEN CHIEN-HUEI ADAM·Filed 2007·Granted Mar 13, 2012·33 cites·26 claims
- 0487US8000922B2Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithmKLA TENCOR CORP·Filed 2008·Granted Aug 16, 2011·16 cites·20 claims
- 0586US9087367B2Determining design coordinates for wafer defectsCHANG ELLIS·Filed 2012·Granted Jul 21, 2015·11 cites·27 claims
- 0686US7522664B1Remote live video inspectionBHASKAR KRISHNAMURTHY·Filed 2003·Granted Apr 21, 2009·42 cites·19 claims
- 0785US8594823B2Scanner performance comparison and matching using design and defect dataPARK ALLEN·Filed 2010·Granted Nov 26, 2013·9 cites·12 claims
- 0884US9483819B2Contour-based array inspection of patterned defectsKLA TENCOR CORP·Filed 2013·Granted Nov 1, 2016·6 cites·18 claims
- 0979US8669523B2Contour-based defect detection using an inspection apparatusCHEN CHIEN-HUEI·Filed 2012·Granted Mar 11, 2014·5 cites·10 claims
- 1070US7345753B2Apparatus and methods for analyzing defects on a sampleKLA TENCOR TECH CORP·Filed 2005·Granted Mar 18, 2008·6 cites·19 claims
- 1165US9318395B2Systems and methods for preparation of samples for sub-surface defect reviewKLA TENCOR CORP·Filed 2012·Granted Apr 19, 2016·2 cites·20 claims
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