Inventor · disambiguated record
Sing-Pin Tay
Also filed as: TAY SING P · TAY SING PIN
24 granted patents·2 pending applications·1,697 citations·filing 1986–2012
97Inventor score
Top patents by PatentIndex Score
26 records- 0198US6451713B1UV pretreatment process for ultra-thin oxynitride formationMATTSON TECH INC·Filed 2001·Granted Sep 17, 2002·510 cites·14 claims
- 0292US6403923B1System for controlling the temperature of a reflective substrate during rapid heatingMATTSON TECH INC·Filed 2000·Granted Jun 11, 2002·66 cites·20 claims
- 0391US6303524B1High temperature short time curing of low dielectric constant materials using rapid thermal processing techniquesMATTSON THERMAL PRODUCTS INC·Filed 2001·Granted Oct 16, 2001·77 cites·34 claims
- 0491US5362669AMethod of making integrated circuitsNORTHERN TELECOM LTD·Filed 1993·Granted Nov 8, 1994·136 cites·5 claims
- 0590US6707011B2Rapid thermal processing system for integrated circuitsMATTSON TECH INC·Filed 2002·Granted Mar 16, 2004·50 cites·41 claims
- 0690US6200023B1Method for determining the temperature in a thermal processing chamberSTEAG RTP SYSTEMS INC·Filed 1999·Granted Mar 13, 2001·92 cites·35 claims
- 0790US5352923ATrench resistors for integrated circuitsNORTHERN TELECOM LTD·Filed 1993·Granted Oct 4, 1994·75 cites·13 claims
- 0888US4996081AMethod of forming multiple nitride coating on siliconELLUL JOSEPH P·Filed 1986·Granted Feb 26, 1991·94 cites·15 claims
- 0987US5296258AMethod of forming silicon carbideNORTHERN TELECOM LTD·Filed 1992·Granted Mar 22, 1994·69 cites·37 claims
- 1086US8236706B2Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structuresPEUSE BRUCE W·Filed 2008·Granted Aug 7, 2012·14 cites·11 claims
- 1186US5316978AForming resistors for intergrated circuitsNORTHERN TELECOM LTD·Filed 1993·Granted May 31, 1994·56 cites·10 claims
- 1285US6600138B2Rapid thermal processing system for integrated circuitsMATTSON TECH INC·Filed 2001·Granted Jul 29, 2003·32 cites·36 claims
- 1385US6204484B1System for measuring the temperature of a semiconductor wafer during thermal processingSTEAG RTP SYSTEMS INC·Filed 1998·Granted Mar 20, 2001·76 cites·22 claims
- 1483US7977258B2Method and system for thermally processing a plurality of wafer-shaped objectsMATTSON TECH INC·Filed 2007·Granted Jul 12, 2011·11 cites·69 claims
- 1583US6359263B2System for controlling the temperature of a reflective substrate during rapid heatingSTEAG RTP SYSTEMS INC·Filed 1999·Granted Mar 19, 2002·69 cites·15 claims
- 1680US6075922AProcess for preventing gas leaks in an atmospheric thermal processing chamberSTEAG RTP SYSTEMS INC·Filed 1997·Granted Jun 13, 2000·68 cites·26 claims
- 1780US5516710AMethod of forming a transistorNORTHERN TELECOM LTD·Filed 1994·Granted May 14, 1996·65 cites·17 claims
- 1875US5773871AIntegrated circuit structure and method of fabrication thereofNORTHERN TELECOM LTD·Filed 1996·Granted Jun 30, 1998·41 cites·3 claims
- 1972US6706643B2UV-enhanced oxy-nitridation of semiconductor substratesMATTSON TECH INC·Filed 2002·Granted Mar 16, 2004·14 cites·17 claims
- 2070US5726084AMethod for forming integrated circuit structureNORTHERN TELECOM LTD·Filed 1996·Granted Mar 10, 1998·32 cites·9 claims
- 2166US4859303AMethod and apparatus for removing coating from substrateNORTHERN TELECOM LTD·Filed 1987·Granted Aug 22, 1989·14 cites·8 claims
- 2252US4836902AMethod and apparatus for removing coating from substrateNORTHERN TELECOM LTD·Filed 1987·Granted Jun 6, 1989·18 cites·5 claims
- 2349US7151060B2Device and method for thermally treating semiconductor wafersMATTSON THERMAL PRODUCTS GMBH·Filed 2003·Granted Dec 19, 2006·4 cites·34 claims
- 2445US2012298039A1Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structuresPEUSE BRUCE W·Filed 2012·Application pending·0 cites
- 2544US4968641AMethod for formation of an isolating oxide layerKALNITSKY ALEXANDER·Filed 1989·Granted Nov 6, 1990·14 cites·13 claims
- 2632US2002009900A1Growth of ultrathin nitride on Si (100) by rapid thermal N2 treatmentFiled 2000·Application pending·0 cites
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