Inventor
YOSHIKAWA WATARU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIKAWA WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUSD645486SSep 20, 2011
Dielectric window for plasma processing device
TOKYO ELECTRON LTD6 citations74
US10896842B2Jan 19, 2021
Manufacturing method of sample table
TOKYO ELECTRON LTD2 citations70
US8889023B2Nov 18, 2014
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD6 citations68
US10144040B2Dec 4, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations41
IBM
2 patentsNEC CORP
2 patentsTOYO BOSEKI
2 patentsYOSHIKAWA WATARU
2 patentsUS8988012B2Mar 24, 2015
Dielectric window for plasma processing apparatus, plasma processing apparatus and method for mounting dielectric window for plasma processing apparatus
YOSHIKAWA WATARU6 citations71
USD672377SDec 11, 2012
Dielectric window for plasma processing device
YOSHIKAWA WATARU4 citations60