Inventor · disambiguated record
Stephan Lassig
Also filed as: LASSIG STEPHAN · LASSIG STEPHAN E
7 granted patents·1 pending application·361 citations·filing 1987–2016
88Inventor score
Top patents by PatentIndex Score
8 records- 0187US4755654ASemiconductor wafer heating chamberCROWLEY JOHN L·Filed 1987·Granted Jul 5, 1988·83 cites·21 claims
- 0286US5548470ACharacterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformityIBM·Filed 1994·Granted Aug 20, 1996·89 cites·21 claims
- 0382US4984902AApparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processingPEAK SYSTEMS INC·Filed 1990·Granted Jan 15, 1991·98 cites·7 claims
- 0481US9865472B2Fabrication of a silicon structure and deep silicon etch with profile controlLAM RES CORP·Filed 2016·Granted Jan 9, 2018·3 cites·13 claims
- 0581US4969748AApparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processingPEAK SYSTEMS INC·Filed 1989·Granted Nov 13, 1990·66 cites·7 claims
- 0675US9330926B2Fabrication of a silicon structure and deep silicon etch with profile controlCHEBI ROBERT·Filed 2008·Granted May 3, 2016·7 cites·32 claims
- 0771US6875699B1Method for patterning multilevel interconnectsLAM RES CORP·Filed 2002·Granted Apr 5, 2005·15 cites·13 claims
- 0837US2004115565A1Method for patterning a layer of a low dielectric constant materialLAM RES CORP·Filed 2003·Application pending·0 cites
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