Inventor
KODERA KENJI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “KODERA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
12 patentsUSD859331SSep 10, 2019
Vacuum contact pad
EBARA CORP11 citations84
USD851141SJun 11, 2019
Pressing member for substrate polishing apparatus
EBARA CORP6 citations83
USD851140SJun 11, 2019
Pressing member for substrate polishing apparatus
EBARA CORP6 citations83
USD851142SJun 11, 2019
Pressing member for substrate polishing apparatus
EBARA CORP4 citations83
USD834075SNov 20, 2018
Pressing member for substrate polishing apparatus
EBARA CORP7 citations83
US10639727B2May 5, 2020
Vacuum suction pad and substrate holder
EBARA CORP2 citations73
US9492910B2Nov 15, 2016
Polishing method
EBARA CORP5 citations72
US9666440B2May 30, 2017
Polishing apparatus and polishing method
EBARA CORP2 citations67
US10632587B2Apr 28, 2020
Polishing apparatus and polishing method
EBARA CORP1 citations62
US10632588B2Apr 28, 2020
Polishing apparatus and pressing pad for pressing polishing tool
EBARA CORP1 citations61
US11331766B2May 17, 2022
Substrate polishing device and polishing method
EBARA CORP0 citations52
US12030092B2Jul 9, 2024
Substrate cleaning method and substrate cleaning apparatus
EBARA CORP0 citations47