Inventor
AKAZAWA KENICHI
JP12 patents
Patents
12 patentsUSD981459SMar 21, 2023
Retaining ring for substrate
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Elastic membrane
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Polishing head and polishing apparatus
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US10525564B2Jan 7, 2020
Reversing machine and substrate polishing apparatus
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USD1021832SApr 9, 2024
Elastic membrane
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USD981969SMar 28, 2023
Elastic membrane for semiconductor wafer polishing apparatus
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US10593570B2Mar 17, 2020
Substrate holding module, substrate processing apparatus, and substrate processing method
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US12337438B2Jun 24, 2025
Break-in processing apparatus and break-in processing method
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US10141211B2Nov 27, 2018
Substrate processing apparatus and substrate transfer method
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US9786532B2Oct 10, 2017
Substrate processing apparatus and method of transferring a substrate
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US12237194B2Feb 25, 2025
Substrate transporter and substrate processing apparatus including substrate transporter
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US10160013B2Dec 25, 2018
Rinsing bath and substrate cleaning method using such rinsing bath
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